论文信息 - Deposition of carbon nitride films by filtered cathodic vacuum arc combined with radio frequency ion beam source - 字舞流文

Deposition of carbon nitride films by filtered cathodic vacuum arc combined with radio frequency ion beam source

C. Xie | S. Lau | B. Tay | Xu. Shi | X. Qiao | H. Chua | Y. Cheng | Yule Wu | Jie Chen | Y. H. Cheng