论文信息 - 10 × 100 mm 4H-SiC Epitaxial Growth by Warm-Wall Planetary Reactor - 字舞流文

10 × 100 mm 4H-SiC Epitaxial Growth by Warm-Wall Planetary Reactor

Wanshun Zhao | Lei Wang | Lin Dong | Zhanguo Wang | G. Sun | X. Zhang | Guoguo Yan | X. Li | Jun Yu