A Micro-Stage for Linear-Rotary Positioning

In this paper, a novel Z-θZ micro-stage is designed and constructed by utilizing an impact friction drive. The stage is configured by two driving units, a moving element and a stage base. Each driving unit consists of two PZTs and a friction element. One end of each PZT is fixed on the stage base, and the other end is attached on a permanent magnet as the friction element. The moving element, which is a steel cylinder, is supported and moved by the friction element. Magnetic force generated by permanent magnet is utilized to stabilize the driving condition between the moving element and the friction element for the friction drive. The size of the stage is less than 1 cm3. The stroke and the maximum speed of the stage in the Z-direction are 3.8 mm, 5.7 mm/s, respectively. The stroke in the θZ-direction is unlimited and the maximum rotational velocity is 26 rpm.

[1]  Katsushi Furutani,et al.  Coarse and fine positioning performance of an L-shaped seal mechanism with three degrees of freedom , 2004 .

[2]  Eiji Shamoto,et al.  Development of a “walking drive” ultraprecision positioner , 1997 .

[3]  Nobuyuki Iwatsuki,et al.  Application of Fuzzy PI control to improve the positioning accuracy of a rotary-linear motor driven by two-dimensional ultrasonic actuators , 2000, Microprocess. Microsystems.

[4]  T. Higuchi,et al.  Precise positioning mechanism utilizing rapid deformations of piezoelectric elements , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[5]  Wei Gao,et al.  Design of a Precision Linear-Rotary Positioning Actuator , 2006, J. Robotics Mechatronics.

[6]  E. A. Mendrela,et al.  Double-Winding Rotary-Linear Induction Motor , 1987, IEEE Power Engineering Review.

[7]  Yoshikazu Arai,et al.  Design of a linear-rotary micro-stage , 2011, International Symposium on Precision Engineering Measurement and Instrumentation.

[8]  Yoshikazu Arai,et al.  A linear-rotary stage for precision positioning , 2010 .

[9]  龍一 吉田,et al.  スムーズインパクト駆動機構(SIDM)の開発 , 1999 .