Predictive modeling of transition undeformed chip thickness in ductile-regime micro-machining of single crystal brittle materials

Abstract This paper proposes a predictive model to determine the undeformed chip thickness in micro-machining of single crystal brittle materials, where the mode of chip formation transitions from the ductile to the brittle regime. The comprehensive model includes a force model considering the rounded tool edge radius effect and ploughing. Irwin's model for computing the stress intensity factor is adopted here as it gives a relation between the stress intensity and applied normal stress including effects of crack size and crack inclination. The occurrence of plastic deformation is built upon the condition that the shear stress in the chip formation region must be greater than the critical shear stress for chip formation and the stress intensity factor must be less than the fracture toughness of the material. The point of transition takes place when the fracture toughness is equal to the stress intensity factor. The above conditions form the theoretical basis for the proposed model in determining the transition undeformed chip thickness. End-turning experiments have been conducted using a single crystal diamond cutting tool on (1 1 1) single crystal silicon, and the results compared to the model predictions for validation. The proposed model would support the determination of the cutting conditions for the micro-machining of a brittle material in ductile manner without resorting to trial and error.

[1]  Eric R. Marsh,et al.  THE EFFECT OF CRYSTALLOGRAPHIC ORIENTATION ON DUCTILE MATERIAL REMOVAL IN SILICON , 2022 .

[2]  Tsunemoto Kuriyagawa,et al.  Ductile regime turning at large tool feed , 2002 .

[3]  Fengzhou Fang,et al.  Diamond Cutting of Silicon with Nanometric Finish , 1998 .

[4]  S. Aravindan,et al.  Machining of Hard-Brittle Materials by a Single Point Tool Under External Hydrostatic Pressure , 2005 .

[5]  J. Patten,et al.  Extreme negative rake angle technique for single point diamond nano-cutting of silicon , 2001 .

[6]  D. Agard,et al.  Microtubule nucleation by γ-tubulin complexes , 2011, Nature Reviews Molecular Cell Biology.

[7]  Tsunemoto Kuriyagawa,et al.  Single-point diamond turning of CaF2 for nanometric surface , 2004 .

[8]  R. Scattergood,et al.  Ductile-Regime Grinding: A New Technology for Machining Brittle Materials , 1991 .

[9]  Wing Bun Lee,et al.  Diamond turning of silicon substrates in ductile-regime , 1998 .

[10]  Kenji Inoue,et al.  Ultraprecision ductile cutting of glass by applying ultrasonic vibration , 1992 .

[11]  M. Rahman,et al.  A study of the cutting modes in the grooving of tungsten carbide , 2004 .

[12]  Kui Liu,et al.  Nano-precision measurement of diamond tool edge radius for wafer fabrication , 2003 .

[13]  J. Patten,et al.  Ductile Regime Nanomachining of Single-Crystal Silicon Carbide , 2005 .

[14]  B. Lawn,et al.  Brittleness as an indentation size effect , 1976 .

[15]  William J. Endres,et al.  A New Model and Analysis of Orthogonal Machining With an Edge-Radiused Tool , 2000 .

[16]  F. Hauser,et al.  Deformation and Fracture Mechanics of Engineering Materials , 1976 .

[17]  K. Ma,et al.  Ductile behaviour in single-point diamond-turning of single-crystal silicon , 2002 .

[18]  A. Evans,et al.  A model for crack initiation in elastic/plastic indentation fields , 1977 .

[19]  Ronald O. Scattergood,et al.  Ductile‐Regime Machining of Germanium and Silicon , 1990 .

[20]  Nakasuji Tomoaki,et al.  Diamond Turning of Brittle Materials for Optical Components , 1990 .

[21]  R. G. Jasinevicius Influence of cutting conditions scaling in the machining of semiconductors crystals with single point diamond tool , 2006 .

[22]  Kanji Ueda,et al.  A J-Integral Approach to Material Removal Mechanisms in Microcutting of Ceramics , 1991 .

[23]  M. E. Merchant Mechanics of the Metal Cutting Process. I. Orthogonal Cutting and a Type 2 Chip , 1945 .

[24]  W. S. Blackley,et al.  Ductile-regime machining model for diamond turning of brittle materials , 1991 .