Systems and technology for production-scale molecular beam epitaxy

Abstract A comprehensive overview is provided for the current state of production-scale molecular beam epitaxy (MBE) system hardware and applications as well as future directions in production-scale MBE. An introduction is provided, discussing the applications and markets for which devices are mass produced by MBE. This is compared and contrasted alongside other competing manufacturing techniques such as metalorganic chemical vapor deposition (MOCVD). The current state of production MBE hardware is also presented, with a thorough review of all critical system subassemblies and components. The design needs of the production-scale hardware are contrasted with the needs of smaller, research and development (R&D)-scale MBE systems. A number of the hardware and process challenges in scaling from typical R&D-scale MBE systems to production-scale systems are discussed along with the common techniques for mitigating these issues. Finally, a discussion of the future trends and opportunities in the production MBE is presented. We provide an overview, covering a wide range of material and device applications that are currently areas of active R&D that have the potential to evolve to large-volume production in the future. The potential and challenges of many of these new devices and applications are discussed along with due consideration to the viability of alternative techniques such as MOCVD.

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