论文信息 - Design and Fabrication of SiN-Si Dual-Layer Optical Phased Array Chip - 字舞流文

Design and Fabrication of SiN-Si Dual-Layer Optical Phased Array Chip

Xuliang Zhou | Jiao-qing Pan | Yejin Zhang | Yanmei Su | Yajie Li | Pengfei Wang | Guangzhen Luo | Ruiting Wang | Jianbin Ma | Yang Xu | Zhengxia Yang