论文信息 - Design, fabrication and measurements with a UV linear-variable optical filter microspectrometer

Design, fabrication and measurements with a UV linear-variable optical filter microspectrometer

An IC-Compatible Linear-Variable Optical Filter (LVOF) for application in the UV spectral range between 310 nm and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a Xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the Mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.

[1] Anthony J. Merer,et al. Spectroscopy of the Diatomic 3d Transition Metal Oxides , 1989 .

[2] Giovanni Puglisi,et al. Potential application of UV reflection spectroscopy on solid pharmaceutical formulation analysis , 1996 .

[3] Darrell L. Judge,et al. Low and room temperature photoabsorption cross sections of NH3 in the UV region , 1998 .

[4] Alison Rodger,et al. Biomacromolecular Applications of UV-Visible Absorption Spectroscopy , 1999 .

[5] Robert R McLeod,et al. Improving the spectral resolution of wedged etalons and linear variable filters with incidence angle. , 2005, Optics letters.

[6] José Higino Correia,et al. UV Bandpass Optical Filter for Microspectometers , 2007 .

[7] P. Kiesel,et al. Performance of chip-size wavelength detectors. , 2007, Optics express.

[8] S. Grabarnik,et al. Vertically tapered layers for optical applications fabricated using resist reflow , 2009 .

[9] E. Cretu,et al. Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime , 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.

[10] Peter Enoksson,et al. An UV linear variable optical filter-based micro-spectrometer , 2010 .

[11] Arvin Emadi,et al. Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter. , 2012, Optics express.