Design and Testing of a 2-DOF Flexure-based Compliant Stage

This paper presents the mechanical design and testing of a 2-DOF flexure-based compliant stage. The prismatic joints are first discussed. To obtain high resonance frequency and decoupled property, the stage composed of four parallel chains with symmetrical configuration should be employed. Finally, an experimental platform is set up to test the cooperative tracking performance. The experimental trajectory is in good agreement with the desired trajectory under various input frequencies. It shows that the maximum tracking error exhibits an increase from 0.8% to 2.7%. The experiment results demonstrate that the proposed compliant stage possess good tracking performance under 100 Hz, which also validates the reasonability of the stage.