论文信息 - Monolithic integration of RF MEMS switches with a diversity antenna on PCB substrate

Monolithic integration of RF MEMS switches with a diversity antenna on PCB substrate

A novel process for monolithic integration of RF microelectromechanical system (MEMS) switches with three-dimensional antenna elements on a microwave laminate printed circuit board (PCB) is presented. This process calls for a low-temperature (90/spl deg/C-170/spl deg/C) high-density inductively coupled plasma chemical vapor deposition technique that allows the choice of any PCB substrate, such as RO4003-FR4 (/spl epsiv//sub r/=3.38, tan/spl delta/=0.002), with the desired electrical properties for antenna applications. A two-element diversity antenna system monolithically integrated with RF MEMS switches is designed and demonstrated.

[1] Gabriel M. Rebeiz,et al. Distributed MEMS true-time delay phase shifters and wide-band switches , 1998 .

[2] R. Howe,et al. Batch transfer of microstructures using flip-chip solder bonding , 1999 .

[3] A. Malczewski,et al. RF MEMs variable capacitors for tunable filters , 1999 .

[4] S. Eshelman,et al. Micromachined low-loss microwave switches , 1999 .

[5] Gabriel M. Rebeiz,et al. High-isolation CPW MEMS shunt switches. 1. Modeling , 2000 .

[6] Victor M. Bright,et al. The realization and design considerations of a flip-chip integrated MEMS tunable capacitor , 2000 .

[7] Gabriel M. Rebeiz,et al. High-isolation CPW MEMS shunt switches. 2. Design , 2000 .

[9] J.B. Hacker,et al. A monolithic MEMS switched dual-path power amplifier , 2001, IEEE Microwave and Wireless Components Letters.

[10] Bedri A. Cetiner,et al. Miniature multi-element antenna for wireless communications , 2002 .

[11] B.A. Cetiner,et al. Integrated MEM antenna system for wireless communications , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[12] F. De Flaviis,et al. RF MEMS capacitive switches fabricated with HDICP CVD SiN/sub x/ , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[13] F. De Flaviis,et al. RF MEMS switches fabricated on microwave-laminate printed circuit boards , 2003, IEEE Electron Device Letters.