A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches
暂无分享,去创建一个
[1] C. Goldsmith,et al. Micromechanical membrane switches for microwave applications , 1995, Proceedings of 1995 IEEE MTT-S International Microwave Symposium.
[2] Gabriel M. Rebeiz,et al. RF MEMS switches and switch circuits , 2001 .
[3] H. S. Newman,et al. RF MEMS switches and applications , 2002, 2002 IEEE International Reliability Physics Symposium. Proceedings. 40th Annual (Cat. No.02CH37320).
[4] Gabriel M. Rebeiz,et al. A DC-contact MEMS shunt switch , 2002, IEEE Microwave and Wireless Components Letters.
[5] Ingrid De Wolf,et al. Characterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrations , 2004 .
[6] Bernd Hillerich,et al. Comparison of lateral and vertical switches for application as microrelays , 1999 .
[7] Norman C. Tien,et al. A micromachined RF microrelay with electrothermal actuation , 2003 .
[8] P. Fiorini,et al. Novel RF-MEMS capacitive switching structures , 2002, 2002 32nd European Microwave Conference.
[9] M-A Grétillat,et al. Micromechanical relay with electrostatic actuation and metallic contacts , 1999 .
[10] K. Petersen. Micromechanical membrane switches on silicon , 1979 .
[11] J. Jason Yao,et al. RF MEMS from a device perspective , 2000 .
[12] S. Eshelman,et al. Micromachined low-loss microwave switches , 1999 .
[13] Hiroshi Hosaka,et al. Electromagnetic microrelays: Concepts and fundamental characteristics , 1994 .
[14] I. De Wolf,et al. Experimental characterization of stiction due to charging in RF MEMS , 2002, Digest. International Electron Devices Meeting,.
[15] K. Pister,et al. Lateral MEMS microcontact considerations , 1999 .
[16] P. Zavracky,et al. Micromechanical switches fabricated using nickel surface micromachining , 1997 .