A CMOS smart temperature sensor with a 3σ inaccuracy of ±0.1°C from -55°C to 125°C

A low-cost temperature sensor with on-chip sigma-delta ADC and digital bus interface was realized in a 0.5 μm CMOS process. Substrate pnp transistors are used for temperature sensing and for generating the ADC's reference voltage. To obtain a high initial accuracy in the readout circuitry, chopper amplifiers and dynamic element matching are used. High linearity is obtained by using second-order curvature correction. With these measures, the sensor's temperature error is dominated by spread on the base-emitter voltage of the pnp transistors. This is trimmed after packaging by comparing the sensor's output with the die temperature measured using an extra on-chip calibration transistor. Compared to traditional calibration techniques, this procedure is much faster and therefore reduces production costs. The sensor is accurate to within ±0.5 °C (3σ) from -50 °C to 120 °C.

[1]  J. Huijsing,et al.  A CMOS smart temperature sensor with a 3σ inaccuracy of ±0.5°C from -50°C to 120°C , 2005, IEEE J. Solid State Circuits.

[2]  Johan H. Huijsing,et al.  A CMOS smart temperature sensor with a 3 sigm Inaccuracy of +-0.5 deg C from -50 deg C to 120 deg C , 2005 .

[3]  J.H. Huijsing,et al.  A sigma-delta modulator with bitstream-controlled dynamic element matching , 2004, Proceedings of the 30th European Solid-State Circuits Conference.

[4]  M.A.P. Pertijs,et al.  Precision temperature measurement using CMOS substrate pnp transistors , 2004, IEEE Sensors Journal.

[5]  J.H. Huijsing,et al.  Bitstream trimming of a smart temperature sensor , 2004, Proceedings of IEEE Sensors, 2004..

[6]  G. Meijer,et al.  Minimization of the mechanical-stress-induced inaccuracy in bandgap voltage references , 2003, IEEE J. Solid State Circuits.

[7]  Kofi A. A. Makinwa,et al.  A CMOS temperature sensor with a 3s inaccuracy of 0.1C from -55C to 125C , 2003 .

[8]  Johan H. Huijsing,et al.  Transistor temperature measurement for calibration of integrated temperature sensors , 2002, IMTC/2002. Proceedings of the 19th IEEE Instrumentation and Measurement Technology Conference (IEEE Cat. No.00CH37276).

[9]  C. Hagleitner,et al.  A gas detection system on a single CMOS chip comprising capacitive, calorimetric, and mass-sensitive microsensors , 2002, 2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315).

[10]  Michiel A. P. Pertijs,et al.  A high-accuracy temperature sensor with second-order curvature correction and digital bus interface , 2001, ISCAS 2001. The 2001 IEEE International Symposium on Circuits and Systems (Cat. No.01CH37196).

[11]  G.C.M. Meijer,et al.  Temperature sensors and voltage references implemented in CMOS technology , 2001, IEEE Sensors Journal.

[12]  Gerard C. M. Meijer,et al.  The temperature characteristics of bipolar transistors fabricated in CMOS technology , 2000 .

[13]  A. Bakker,et al.  A CMOS nested-chopper instrumentation amplifier with 100-nV offset , 2000, IEEE Journal of Solid-State Circuits.

[14]  A. Bakker,et al.  High-Accuracy CMOS Smart Temperature Sensors , 2000 .

[15]  Fabiano Fruett,et al.  The piezojunction effect in NPN and PNP vertical transistors and its influence on silicon temperature sensors , 2000 .

[16]  Kofi Makinwa,et al.  13.1 A CMOS Temperature Sensor with a 3σ Inaccuracy of ±0.1°C from –55°C to 125°C , 2000 .

[17]  M. Tuthill,et al.  A switched current, switched capacitor temperature sensor in 0.6u CMOS , 1998, Proceedings of the 23rd European Solid-State Circuits Conference.

[18]  Gert van der Horn,et al.  Integrated Smart Sensors: Design and Calibration , 1997 .

[19]  R. Schreier,et al.  Delta-sigma data converters : theory, design, and simulation , 1997 .

[20]  Gabor C. Temes,et al.  Circuit techniques for reducing the effects of op-amp imperfections: autozeroing, correlated double sampling, and chopper stabilization , 1996, Proc. IEEE.

[21]  Johan H. Huijsing,et al.  Micropower CMOS temperature sensor with digital output , 1996, IEEE J. Solid State Circuits.

[22]  Franco Maloberti,et al.  Smart sensor interface with A/D conversion and programmable calibration , 1994, IEEE J. Solid State Circuits.

[23]  G. Geelen,et al.  A fast-settling CMOS op amp for SC circuits with 90-dB DC gain , 1990 .

[24]  Gerard C. M. Meijer,et al.  A three-terminal intergrated temperature transducer with microcomputer interfacing , 1989 .

[25]  P. Deval,et al.  A Second-Order High-Resolution Incremental A/D Converter with Offst and Charge Injection Compensation , 1987, ESSCIRC '87: 13th European Solid-State Circuits Conference.

[26]  Gerard C. M. Meijer.  Thermal sensors based on transistors , 1986 .