In order to optimize inhalation method for lung ventilation imaging with Tc-99m-gas (TECHNEGAS), relation between lung deposition of TECHNEGAS and inhalation method was evaluated. Submaximal inhalation with breath-holding (BH), continuous submaximal inhalation (C) and tidal inhalation (TV) were compared in 35 patients (36 studies) with various lung diseases. Mean lung deposition of TECHNEGAS was 6.6-7.4%/LD in BH group and was significantly higher than other groups of inhalation method (p less than 0.05-0.001). Lung deposition increased according to the times of inhalation in C group. TV group resulted in the lowest lung deposition which was same as 5 times of inhalation in C group. Lung/filter ratio (L/F) was highest in BH group. Image quality of TECHNEGAS was significantly better in BH group. Hot spot in central airway was seen in 15% of patients. All of them was in TV or C groups. In order to improve lung deposition and image quality of the TECHNEGAS, sufficient breath-holding was important. L/F seemed to be the index of effective inhalation of the TECHNEGAS. TV was suitable for poorly cooperative or dyspneic patients. TECHNEGAS was useful for evaluation of lung ventilation to provide good quality image with safety and simplicity.