Electromigration-aware routing for 3D ICs with stress-aware EM modeling

Electromigration (EM) has become a key reliability concern for nanometer IC designs. For 3D ICs, higher current density/temperature and TSV-induced thermal mechanical stress further exacerbate the EM issue compared to 2D ICs. In this paper, we analyze the root causes of EM for 3D IC signal nets, with consideration of current density, temperature, and TSV-induced thermal mechanical stress. We develop compact EM models for both DC and AC signal nets using detailed finite-element-analysis (FEA) and build EM library for mean-time-to-failure (MTTF). For AC signal nets, we convert AC current into equivalent DC current and model EM with it. One unique property of EM in 3D ICs is that, depending on the current direction, TSV-induced stress may degrade or improve the MTTF, thus routing plays an important role for EM mitigation. We suggest EM-aware routing algorithms for 3D ICs for the first time to our best knowledge, guided by our stress-aware EM modeling. Experimental result shows that our proposed approach improves EM-robustness of 3D IC benchmarks significantly, e.g., 66.4% less EM-violated grids with little sacrifice of conventional routing objectives.

[1]  G. Meng,et al.  Electromigration Simulation for Metal Lines , 2010 .

[2]  Chak-Kuen Wong,et al.  Global routing based on Steiner min-max trees , 1990, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[3]  Cher Ming Tan,et al.  Electromigration performance of Through Silicon Via (TSV) - A modeling approach , 2010, Microelectron. Reliab..

[4]  Frank Cano,et al.  A practical approach to static signal electromigration analysis , 1998, DAC.

[5]  Leon Sigal,et al.  Uniting to overcome a mounting BEOL electromigration reliability challenge , 2011, ICCAD '11.

[6]  David Z. Pan,et al.  A fast simulation framework for full-chip thermo-mechanical stress and reliability analysis of through-silicon-via based 3D ICs , 2011, 2011 IEEE 61st Electronic Components and Technology Conference (ECTC).

[7]  Frank Liu,et al.  Efficient computation of current flow in signal wires for reliability analysis , 2007, 2007 IEEE/ACM International Conference on Computer-Aided Design.

[8]  K. Tu Recent advances on electromigration in very-large-scale-integration of interconnects , 2003 .

[9]  K. Tu Recent advances on electromigration in very-large-scale-integration of interconnects , 2003 .

[10]  Cher Ming Tan,et al.  Electromigration in ULSI Interconnections , 2010, International Series on Advances in Solid State Electronics and Technology.

[11]  Sung Kyu Lim,et al.  A study of Through-Silicon-Via impact on the 3D stacked IC layout , 2009, 2009 IEEE/ACM International Conference on Computer-Aided Design - Digest of Technical Papers.

[12]  Jiwoo Pak,et al.  Electromigration modeling and full-chip reliability analysis for BEOL interconnect in TSV-based 3D ICs , 2011, 2011 IEEE/ACM International Conference on Computer-Aided Design (ICCAD).

[13]  David Blaauw,et al.  Static electromigration analysis for on-chip signal interconnects , 2003, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[14]  Lars Hedrich,et al.  A current driven routing and verification methodology for analog applications , 2000, Proceedings 37th Design Automation Conference.

[15]  Kun Yuan,et al.  BoxRouter 2.0: A hybrid and robust global router with layer assignment for routability , 2009, TODE.

[16]  Kaustav Banerjee,et al.  Coupled analysis of electromigration reliability and performance in ULSI signal nets , 2001, ICCAD.

[17]  Kevin Skadron,et al.  Interconnect lifetime prediction under dynamic stress for reliability-aware design , 2004, IEEE/ACM International Conference on Computer Aided Design, 2004. ICCAD-2004..

[18]  Zhi-Wei Chen,et al.  Electromigration-aware rectilinear Steiner tree construction for analog circuits , 2008, APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems.

[19]  X. Federspiel,et al.  Stress-induced electromigration backflow effect in copper interconnects , 2006, IEEE Transactions on Device and Materials Reliability.

[20]  J. Black Mass transport of aluminum by momentum exchange with conducting electrons , 1967, 2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual..

[21]  Yong Liu,et al.  Modeling of electromigration of the through silicon via interconnects , 2010, 2010 11th International Conference on Electronic Packaging Technology & High Density Packaging.

[22]  Iris Hui-Ru Jiang,et al.  Optimal wiring topology for electromigration avoidance considering multiple layers and obstacles , 2010, ISPD '10.

[23]  David Z. Pan,et al.  Reliability-aware global routing under thermal considerations , 2009, 2009 1st Asia Symposium on Quality Electronic Design.

[24]  W. Hunter,et al.  AC electromigration characterization and modeling of multilayered interconnects , 1993, 31st Annual Proceedings Reliability Physics 1993.

[25]  Jens Lienig,et al.  Electromigration avoidance in analog circuits: two methodologies for current-driven routing , 2002, Proceedings of ASP-DAC/VLSI Design 2002. 7th Asia and South Pacific Design Automation Conference and 15h International Conference on VLSI Design.

[26]  Jiwoo Pak,et al.  Modeling of electromigration in through-silicon-via based 3D IC , 2011, 2011 IEEE 61st Electronic Components and Technology Conference (ECTC).

[27]  Yong Liu,et al.  3D Modeling of Electromigration Combined with Thermal-Mechanical Effect for IC Device and Package , 2007, 2007 International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems. EuroSime 2007.

[28]  Y. Fefer,et al.  Increased Resistive Losses of Copper Interconnects in ULSI Devices—A Reliability Issue , 2011, IEEE Transactions on Device and Materials Reliability.

[29]  Suk-kyu Ryu,et al.  Thermo-mechanical reliability of 3-D ICs containing through silicon vias , 2009, 2009 59th Electronic Components and Technology Conference.

[30]  I. Blech Electromigration in thin aluminum films on titanium nitride , 1976 .

[31]  S. Selberherr,et al.  A Comprehensive TCAD Approach for Assessing Electromigration Reliability of Modern Interconnects , 2009, IEEE Transactions on Device and Materials Reliability.