마이크로 어셈블리용 6자유도 정렬기의 기구학적 분석 및 디자인

This work will develop a 6-DOF precision aligner with small size and high resolution for assembling the micro parts for a mobile electronics. Here, Tiny PicomotorTM actuator that is small and reliable will be applied to this aligner system. The principle of this actuator is PZT that turns a precision thread and then the screw moves linearly. Arrangement of actuators will be a symmetrical based on kinematic design. This paper presents combining two modules of mechanism for the 6-DOF precision aligner. The first is a stage which can control XYθz motion, and the second can control Z motion, in other words, Z tilt motion. According to its specifications, it is expected to satisfy requirement of precision.