The Research on MEMS Micro Capacitance Sensor Detection Based on MS3110

A universal capacitive readout integrated circuit MS3110 is used to measure capacitances in micro capacitance sensor. The configuration, operating principle and process of MS3110 are introduced and a method of programming the inner register on-chip with STM32 is presented with the control block diagram. Performance of MS3110 has been tested by the inner adjust capacitance. A comb micro accelerometer is designed and manufactured. A tentative equivalent electric model of accelerometer is built according to a series of capacitance tests, and the influence of parasitic capacitance in accelerometer system is discussed.