Comprehensive frequency-dependent substrate noise analysis using boundary element methods

We present a comprehensive methodology for the electrodynamic modeling of substrate noise coupling. A new and efficient method is introduced for the calculation of the Green's function that can accommodate arbitrary substrate doping profiles and thus facilitate substrate noise analysis using boundary element methods. In addition to a discussion of the application of the method and its validation in the context of substrate transfer resistance extraction, preliminary results from its application to frequency-dependent substrate noise modeling are presented also.

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