Thermochemical beveling of CVD diamond films intended for precision cutting and measurement applications

Abstract Free-standing microwave plasma enhanced chemical vapor deposited (CVD) diamond films of thickness between 250 and 350 μm are thermochemically beveled at elevated temperatures (≤800 °C) in an argon–hydrogen (96%–4%) gas mixture. Beveling is done on both sides of the films at angles of ≤20°. The radii of curvature of the cutting edges are estimated to be approximately 50 nm using a scanning electron microscope (SEM). These cutting edges can be used as knives for microsurgical applications and as styli for surface roughness measuring equipment such as the stylus profilometer.