Numerical Development of ZnO/Quartz Love Wave Structure for Gas Contamination Detection

Love wave structures are encouraging devices for sensing applications in gaseous or liquid media because of their high sensitivity. In this paper, we first investigate basic properties of a ZnO/quartz Love wave device by the use of theoretical considerations in order to get a good gas sensor. Second, experimental results of the developed structure, ZnO(2.1 mum)/90deg ST-cut quartz, confirm the suitable characteristics, including temperature compensation, high electromechanical coupling coefficient, and good sensitivity to mass loading effect. We finally characterize the gas effect on the photoresist Shipley S1805 with the above structure, and thus we confirm our approach

[1]  Vikram Tolani,et al.  ArF lithography reticle crystal growth contributing factors , 2004, SPIE Photomask Technology.

[2]  B. Auld,et al.  Acoustic fields and waves in solids , 1973 .

[3]  A. Venema,et al.  Love waves for (bio)-chemical sensing in liquids , 1992, IEEE 1992 Ultrasonics Symposium Proceedings.

[4]  M. Vellekoop,et al.  Reducing the temperature sensitivity of Love-wave sensors , 1998, 1998 IEEE Ultrasonics Symposium. Proceedings (Cat. No. 98CH36102).

[5]  F. Sarry,et al.  Zero TCF ZnO/quartz SAW structure for gas sensing applications , 2004, Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004..

[6]  E.G.S. Paige,et al.  Simple technique for the accurate determination of delay-time variations in acoustic-surface-wave structures , 1969 .

[7]  W. Wlodarski,et al.  A layered surface acoustic wave ZnO/LiTaO3 structure with a WO3 selective layer for hydrogen gas sensing , 2003 .

[8]  W. Wlodarski,et al.  Layered SAW nitrogen dioxide sensor based on a ZnO/36/spl deg/ YX LiTaO/sub 3/ structure with WO/sub 3/ selective layer , 2003, IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003.

[9]  B. Sinha.  Propagation Characteristics of Surface Waves in Quartz and Their Influence on Device Performance , 1985, IEEE 1985 Ultrasonics Symposium.

[10]  G. L. Harding,et al.  Design and properties of quartz-based Love wave acoustic sensors incorporating silicon dioxide and PMMA guiding layers , 1997 .

[11]  N. Fujimori,et al.  Theoretical study on SAW characteristics of layered structures including a diamond layer , 1995, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[12]  Wojtek Wlodarski,et al.  Comparison of layered based SAW sensors , 2003 .

[13]  Kofi Korsah,et al.  Harmonic frequency analysis of SAW resonator chemical sensors: application to the detection of carbon dioxide and humidity , 1998 .

[14]  W. Wlodarski,et al.  A novel Love mode SAW sensor with ZnO layer operating in gas and liquid media , 2001, 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263).

[15]  S. Buttgenbach,et al.  Properties of sensors based on shear-horizontal surface acoustic waves in LiTaO/sub 3//SiO/sub 2/ and quartz/SiO/sub 2/ structures , 2001, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[16]  S. Büttgenbach,et al.  Temperature-Compensated Shear-Horizontal Surface Acoustic Waves in Layered Quartz/SiO2-Structures , 1998 .

[17]  K. Ingebrigtsen,et al.  Surface Waves in Piezoelectrics , 1969 .

[18]  Bernhard Jakoby,et al.  Properties of Love waves: applications in sensors , 1997 .

[19]  J.J. Campbell,et al.  A method for estimating optimal crystal cuts and propagation directions for excitation of piezoelectric surface waves , 1968, IEEE Transactions on Sonics and Ultrasonics.