Effect of Stators Geometry on the Resonance Sensitivity of Capacitive MEMS

Abstract The work investigates alternative capacitive sensing topologies for microelectromechanical systems, that simultaneously enable large quasi-stationary sensitivity, comparable to parallel-plates configuration, and large quality (Q) factor. In agreement with the model predictions, about 3-fold larger Q factor and 2-fold larger resonant sensitivity are obtained on the optimized geometry.

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