Mechanism Design and Motion Control of Finger Module for Micro Hand

A dexterous micro manipulation system is developed for application in assembling micro machine, manipulating cells, and micro surgery. We propose a concept of a two finger micro hand, then design and build a finger module based on parallel mechanisms. The module has 6 degrees of freedom with piezo electric devices as actuators. A calibration method based on least square error is proposed for translational motion in task coordinates fixed under a microscope. Coordinated motion is generated by both programming control and joystick teleoperation control. Basic characteristics, such as positioning accuracy, step response, and working space, are evaluated.