An Ultracompact Dual-Stage Converter for Driving Electrostatic Actuators in Mobile Microrobots

Electrostatic actuators are being widely investigated to convert electrical energy into mechanical deformation in a broad variety of microrobotic applications. Both electrostatic gap closing and comb drive actuators require high excitation voltages for high performance operation. In the majority of applications, external bulky and heavy power supplies are used to provide such high voltages, which inevitably bring limitations on autonomous operation. One of the major challenges toward enabling operation of these systems without a bulky external power source is the development of ultralight and high power density power electronic interfaces (PEIs) with large step-up gains. In this paper, a special circuit topology, controlled by a pulse frequency modulation scheme, is introduced to meet stringent electrical and drive voltage requirements of electrostatic actuators. An ultracompact 63 mg (excluding PCB mass), 31.5 mm 2, and 500 mW PEI has been designed and fabricated. Experimental validations have been carried out to verify the circuit's ability to drive an 110-V-input electrostatic inchworm motor at 1-kHz actuating frequency.

[1]  Josef A. Nossek,et al.  Optimal charging of capacitors , 2000 .

[2]  Glenn R. Heppler,et al.  A large-stroke electrostatic micro-actuator , 2011 .

[3]  Andrew Burke,et al.  Ultracapacitor technologies and application in hybrid and electric vehicles , 2009 .

[4]  H. K. Liao,et al.  Study and implementation of a novel bidirectional DC-DC converter with high conversion ratio , 2011, 2011 IEEE Energy Conversion Congress and Exposition.

[5]  S. Michel,et al.  Stacked dielectric elastomer actuator for tensile force transmission , 2009 .

[6]  Dzung Viet Dao,et al.  Multimodule Micro Transportation System Based on Electrostatic Comb-Drive Actuator and Ratchet Mechanism , 2011, Journal of Microelectromechanical Systems.

[7]  Lijun Wang,et al.  A Micropower Miniature Piezoelectric Actuator for Implantable Middle Ear Hearing Device , 2011, IEEE Transactions on Biomedical Engineering.

[8]  A. Wilhelm,et al.  Evaluation of a micro fuel cell as applied to a mobile robot , 2005, IEEE International Conference Mechatronics and Automation, 2005.

[9]  Avishay Bransky,et al.  A microfluidic droplet generator based on a piezoelectric actuator. , 2009, Lab on a chip.

[10]  Chia-Hsiang Menq,et al.  Hysteresis compensation in electromagnetic actuators through Preisach model inversion , 2000 .

[11]  Ronald S. Fearing,et al.  Power Electronics Design Choice for Piezoelectric Microrobots , 2006, 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[12]  Masayoshi Esashi,et al.  An Active Guide Wire With Shape Memory Alloy Bending Actuator Fabricated By Room Temperature Process , 2002 .

[13]  N. Vazquez,et al.  The Tapped-Inductor Boost Converter , 2007, 2007 IEEE International Symposium on Industrial Electronics.

[14]  K. Pister,et al.  An SOI process for fabrication of solar cells, transistors and electrostatic actuators , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[15]  R. Maboudian,et al.  High-performance surface-micromachined inchworm actuator , 2003, Journal of Microelectromechanical Systems.

[16]  Robert J. Wood,et al.  Biomimetic Robots , 2016, Springer Handbook of Robotics, 2nd Ed..

[17]  Adrian Ioinovici,et al.  A single switch boost-flyback DC-DC converter integrated with switched-capacitor cell , 2011, 8th International Conference on Power Electronics - ECCE Asia.

[18]  K. Pister,et al.  Single mask, large force, and large displacement electrostatic linear inchworm motors , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[19]  Haoyu Wang,et al.  A Bridgeless Boost Rectifier for Low-Voltage Energy Harvesting Applications , 2013, IEEE Transactions on Power Electronics.

[20]  Robert J. Wood,et al.  The First Takeoff of a Biologically Inspired At-Scale Robotic Insect , 2008, IEEE Transactions on Robotics.

[21]  S Erol.  Swarm Robotics: From Sources of Inspiration to Domains of Application , 2005 .

[22]  Ivan Penskiy,et al.  Efficient electrostatic inchworm motors with simple control and high force density , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[23]  Fang Lin Luo,et al.  Positive output cascade boost converters , 2004 .

[24]  Robert J. Wood,et al.  Sensors and Actuators A: Physical , 2009 .

[25]  Robert J. Wood,et al.  A review of actuation and power electronics options for flapping-wing robotic insects , 2008, 2008 IEEE International Conference on Robotics and Automation.

[26]  R.G. Polcawich,et al.  PZT MEMS Actuated Flapping Wings for Insect-Inspired Robotics , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[27]  Il-Han Hwang,et al.  Optimized electrostatic inchworm motors using a flexible driving arm , 2012 .

[28]  Peng Zeng,et al.  Kinetic Energy Harvesting Using Piezoelectric and Electromagnetic Technologies—State of the Art , 2010, IEEE Transactions on Industrial Electronics.

[29]  Robert J. Wood,et al.  Monolithic fabrication of millimeter-scale machines , 2012 .

[30]  Aaron P. Gerratt,et al.  SOI/elastomer process for energy storage and rapid release , 2010 .

[31]  Robert J. Wood,et al.  Design and fabrication of ultralight high-voltage power circuits for flapping-wing robotic insects , 2011, 2011 Twenty-Sixth Annual IEEE Applied Power Electronics Conference and Exposition (APEC).

[32]  Aaron P. Gerratt,et al.  Batch fabricated bidirectional dielectric elastomer actuators , 2011, International Solid-State Sensors, Actuators and Microsystems Conference.

[33]  Aaron P. Gerratt,et al.  Incorporating compliant elastomers for jumping locomotion in microrobots , 2012 .

[34]  Bernhard E. Boser,et al.  Charge control of parallel-plate, electrostatic actuators and the tip-in instability , 2003 .