Formation and its characteristics of PLZT layered film structure for transducers

This paper reports on the formation of a new layered film structure and the highly improved photovoltaic output of the lead lanthanum zirconate titanate (PLZT) employed. PLZT film was deposited onto a Pt/Ti/SiO2/Si substrate and sandwiched vertically between electrodes. The new structure design is described using a top transparent indium tin oxide (ITO) electrode. Inspection by X-ray diffraction revealed that the PLZT film had a perovskite structure. The PLZT film structure exhibited V and μA output. This means that the photovoltaic current of the PLZT film per unit width was more than 102 times larger than that of bulk PLZT, while the photovoltaic voltage per unit thickness in the layered film structure was almost the same as that in bulk ceramics. These differences are due to the characteristics of the film structure and configuration of the electrode. In addition to the photovoltaic output the PLZT film also has the advantage of its easily controllable parameters: film thickness, illuminated area and illumination intensity. A simple model is used for the phenomenological explanation of the improved photovoltaic effect of the PLZT film.

[1]  Ryutaro Maeda,et al.  Effect of Pb Content in Target on Electrical Properties of Laser Ablation Derived Lead Zirconate Titanate Thin Films , 2000 .

[2]  Kazuhiro Nonaka,et al.  Bulk Photovoltaic Effect in Reduced/Oxidized Lead Lanthanum Titanate Zirconate Ceramics , 1995 .

[3]  T. Futakuchi,et al.  Preparation of Ba(Ti, Zr)O3 Thick Films by Screen Printing , 2002 .

[4]  R. Maeda,et al.  Effect of Pb Content on Electric Properties of Sol-Gel Derived Lead Zirconate Titanate Thin Films Prepared by Three-Step Heat-Treatment Process , 1999 .

[5]  Kazuhiro Nonaka,et al.  Effect of Pb/(Zr+Ti) molar ratio on the photovoltaic properties of lead zirconate-titanate ceramics , 1999 .

[6]  M. Ichiki,et al.  Electrical Properties of Ferroelectric Lead Lanthanum Zirconate Titanate as an Energy Transducer for Application to Electrostatic-Optical Motor , 2002 .

[7]  Rocca,et al.  Giant bulk photovoltaic effect under linearly polarized x-ray synchrotron radiation. , 1995, Physical review letters.

[8]  Takeshi Nakada,et al.  Study on Optical Servo System (Modelling for Photovoltaic Effect in PLZT Element) , 1993, J. Robotics Mechatronics.

[9]  Ryutaro Maeda,et al.  Novel multibridge-structured piezoelectric microdevice for scanning force microscopy , 2000 .

[10]  P. S. Brody Optomechanical bimorph actuator , 1983 .

[11]  Makoto Kimura,et al.  Study on Optical Servo System. Modelling for Photovoltaic Effect in PLZT Element. , 1992 .

[12]  K. Nonaka,et al.  Nonstoichiometry Effects and Their Additivity on Anomalous Photovoltaic Efficiency in Lead Lanthanum Zirconate Titanate Ceramics , 1995 .

[13]  M. Kimura,et al.  Study on Optical Servo System (Estimation of Dynamic Characteristics of Bimorph-Type Optical Actuator using PLZT Elements). , 1993 .

[14]  Makoto Tanaka,et al.  Structural formation of the lead zirconate titanate formed in pulsed-laser ablation deposition , 2001, SPIE Optics + Photonics.

[15]  Takeshi Nakada,et al.  Bimorph-Type Optical Actuator Using PLZT Elements Position Control of Optical Actuator by On-Off Control. , 1998 .

[16]  R. Maeda,et al.  Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[17]  S. Matsumoto,et al.  Development of bi-directional valve-less micropump for liquid , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[18]  Masaaki Ichiki,et al.  Electrical Properties of Photovoltaic PLZT and its Application to Optical Motor , 2002 .

[19]  A. Glass,et al.  Excited state polarization, bulk photovoltaic effect and the photorefractive effect in electrically polarized media , 1975 .

[20]  Toshio Fukuda,et al.  Cordless Optical Power Supply for Micromachine , 1999, J. Robotics Mechatronics.

[21]  R. Maeda,et al.  Preparation of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing: Sol‐Gel Method and Laser Ablation , 2004 .