High-Performance, Spin-Coated Zinc Tin Oxide Thin-Film Transistors

We have developed a general and low-cost, solution-based process that is suitable for the deposition of transparent conducting oxides through spin-coating or inkjet printing under ambient conditions. Highly transparent (-95% in the visible portion) zinc tin oxide semiconducting thin films were deposited by spin coating. The deposited films were found to be smooth and uniform with an amorphous structure. Enhancement-mode metal-insulator-semiconductor field-effect transistors were fabricated showing a field-effect mobility (μ FE ) as high as 16 cm 2 /V s, a turn-on voltage of 2 V, a current on-to-off ratio greater than 10 5 , and a high on-current of 2.25 mA.

[1]  Benjamin J. Norris,et al.  ZnO-based transparent thin-film transistors , 2003 .

[2]  Pedro Barquinha,et al.  Wide-bandgap high-mobility ZnO thin-film transistors produced at room temperature , 2004 .

[3]  A. Afzali,et al.  High-mobility ultrathin semiconducting films prepared by spin coating , 2004, Nature.

[4]  T. Miyata,et al.  Work function of transparent conducting multicomponent oxide thin films prepared by magnetron sputtering , 1998 .

[5]  T. Miyata,et al.  Preparation of transparent and conductive multicomponent Zn-In-Sn oxide thin films by vacuum arc plasma evaporation , 2005 .

[6]  J. A. del Cueto,et al.  Combinatorial studies of Zn-Al-O and Zn-Sn-O transparent conducting oxide thin films , 2002 .

[7]  Randy Hoffman,et al.  High mobility transparent thin-film transistors with amorphous zinc tin oxide channel layer , 2005 .

[8]  Randy Hoffman,et al.  High-performance flexible zinc tin oxide field-effect transistors , 2005 .

[9]  Hirotoshi Sato,et al.  Highly Transparent and Conductive Zinc-Stannate Thin Films Prepared by RF Magnetron Sputtering , 1994 .

[10]  R. McLean,et al.  Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering , 2003 .

[11]  Douglas A. Keszler,et al.  Spin-coated zinc oxide transparent transistors , 2003 .

[12]  H. Ohta,et al.  Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors , 2004, Nature.

[13]  D. Mitzi,et al.  Low‐Voltage Transistor Employing a High‐Mobility Spin‐Coated Chalcogenide Semiconductor , 2005 .

[14]  Yanfa Yan,et al.  Growth and characterization of radio frequency magnetron sputter-deposited zinc stannate, Zn2SnO4, thin films , 2002 .

[15]  R. Hoffman.  ZnO-channel thin-film transistors: Channel mobility , 2004 .

[16]  Y.-J. Chang,et al.  Growth, characterization and application of CdS thin films deposited by chemical bath deposition , 2005 .

[17]  Satoshi Masuda,et al.  Transparent thin film transistors using ZnO as an active channel layer and their electrical properties , 2003 .

[18]  Hirotoshi Sato,et al.  Properties of transparent zinc‐stannate conducting films prepared by radio frequency magnetron sputtering , 1995 .

[19]  Hideo Hosono,et al.  Working hypothesis to explore novel wide band gap electrically conducting amorphous oxides and examples , 1996 .

[20]  R. M. Wolf,et al.  A ferroelectric transparent thin‐film transistor , 1996 .

[21]  Hideo Hosono,et al.  Novel oxide amorphous semiconductors: transparent conducting amorphous oxides , 1996 .

[22]  Tadatsugu Minami,et al.  Transparent and conductive multicomponent oxide films prepared by magnetron sputtering , 1999 .

[23]  H. Bracht.  Diffusion Mechanisms and Intrinsic Point-Defect Properties in Silicon , 2000 .

[24]  Ridley,et al.  All-Inorganic Field Effect Transistors Fabricated by Printing. , 1999, Science.

[25]  Henning Sirringhaus,et al.  Solution-processed zinc oxide field-effect transistors based on self-assembly of colloidal nanorods. , 2005, Nano letters.

[26]  Tatsuya Shimoda,et al.  Solution-processed silicon films and transistors , 2006, Nature.

[27]  Chih-hung Chang,et al.  Nanocrystalline CdS MISFETs Fabricated by a Novel Continuous Flow Microreactor , 2006 .

[28]  Chih-hung Chang,et al.  Growth Kinetics of Thin-Film Cadmium Sulfide by Ammonia-Thiourea Based CBD , 2004 .