Dark field inspection apparatus
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A dark field inspection apparatus is provided to collect light scattered or reflected to or from the outside of a photographing unit after illumination from an illumination unit and use the collected light in photographing an image of an object to be checked. A lighting unit(110) applies light to an object to be checked on a base(1). A photographing unit(120) collects light scattered from the object to photograph an image of the object. An image processor(130) distinguishes the object by analyzing the image of the object. A reflector(140) reflects light to the object. A light collector(150) collects light incident from the reflector or light emitted from the reflector.