High temperature liquid phase epitaxy of (100) oriented GaInAsSb near the miscibility gap boundary

Abstract The Ga 1- x In x As y Sb 1- y quaternary alloy has been grown by liquid phase epitaxy at high temperature ( T = 600–615° C) on (100) oriented GaSb substrate. The highest indium concentration in the solid phase that could be achieved for perfect GaSb-lattice-matched layers was x = 0.23, which corresponds to a band-gap cut off wavelength λ = 2.39 μm at room temperature. Thermodynamical calculations show this composition ( x = 0.23 y = 0.20) is situated at the boundary of the solid phase miscibility gap (binodal curve). Mismatched quaternary layers with more indium content (up to x = 0.52) could be grown outside the miscibility gap, but their morphology was bad.

[1]  G. B. Stringfellow Miscibility gaps in quaternary III/V alloys , 1982 .

[2]  J. Zyskind,et al.  Liquid phase epitaxial Ga1-xInxAsySb1-y lattice-matched to (100) GaSb over the 1.71 to 2.33μm wavelength range , 1985 .

[3]  M. Panish,et al.  Phase equilibria in III–V quaternary systems—application to Al-Ga-P-As , 1974 .

[4]  F. Karouta,et al.  Low‐temperature phase diagram of the Ga‐As‐Sb system and liquid‐phase‐epitaxial growth of lattice‐matched GaAsSb on (100) InAs substrates , 1986 .

[5]  A. Williams,et al.  Studies of the Ga1-xInxAs1-ySby quaternary alloy system I. liquid-phase epitaxial growth and assessment , 1986 .

[6]  P. Eliseev,et al.  A study of phase equilibria and heterojunctions in Ga–In–As–Sb quaternary system , 1978 .

[7]  S. F. Carter,et al.  Ultimate Realistic Losses Of ZrF4 Based Ir Fibres , 1986, Photonics West - Lasers and Applications in Science and Engineering.

[8]  David E. Aspnes,et al.  Third-derivative modulation spectroscopy with low-field electroreflectance , 1973 .

[9]  John Lehrer Zyskind,et al.  Molecular beam epitaxial growth of InGaAsSb on (100) GaSb with emission wavelength in the 2 to 2.5 μm range , 1987 .

[10]  K. Sugiyama,et al.  2.0 μm c.w. operation of GaInAsSb/GaSb d.h. lasers at 80 K , 1980 .

[11]  Y. Bolkhovityanov The peculiarities of isothermal contact of liquid and solid phase during the LPE of A3B5 compounds , 1981 .

[12]  C. A. Larsen,et al.  MOVPE growth of GaInAsSb , 1986 .

[13]  Y. Bolkhovityanov,et al.  The initial growth stages of III–V lattice-mismatched films grown by liquid phase epitaxy , 1982 .

[14]  K. Nakajima,et al.  The pseudoquaternary phase diagram of the Ga-In-As-Sb system , 1977 .

[15]  É. Tournié,et al.  Characteristic temperature T/sub 0/ of Ga/sub 0.83/In/sub 0.17/As/sub 0.15/Sb/sub 0.85//Al/sub 0.27/Ga/sub 0.73/As/sub 0.02/Sb/sub 0.98/ injection lasers , 1988 .

[16]  Kentaro Onabe,et al.  Unstable Region in Quaternary In1-xGaxAs1-ySby Calculated Using Strictly Regular Solution Approximation , 1982 .

[17]  R. Sankaran,et al.  Liquid phase epitaxial growth of InGaAsSb on (111)B InAs , 1976 .

[18]  A. Joullié,et al.  Croissance par épitaxie en phase liquide et caractérisation d'alliages Ga1-xIoxAsySb1-y à paramètre de maille accordé sur celui de GaSb , 1987 .

[19]  Y. Bolkhovityanov The contact phenomena between the liquid phase and the substrate during LPE of A3B5 compounds , 1982 .

[20]  C. Burrus,et al.  Highly uniform, high quantum efficiency GaInAsSb/AlGaAsSb double heterostructure lasers emitting at 2.2 mu m , 1989 .

[21]  D. W. Kisker,et al.  GaInAsSb metastable alloys grown by organometallic vapor phase epitaxy , 1986 .

[22]  D. Kisker,et al.  Molecular beam epitaxial growth of In1−xGaxAs1−ySby lattice matched to GaSb , 1985 .

[23]  John Lehrer Zyskind,et al.  Room-temperature GaInAsSb/AlGaAsSb DH injection lasers at 2.2 μm , 1985 .

[24]  H. Launois,et al.  Liquid phase epitaxy of unstable alloys: Substrate‐induced stabilization and connected effects , 1983 .

[25]  A. S. Jordan,et al.  Solid-liquid equilibria for quaternary solid solutions involving compound semiconductors in the regular solution approximation , 1975 .

[26]  P. Eliseev,et al.  Injection InGaSbAs lasers emitting radiation of wavelengths 1.9–2.3μ at room temperature , 1985 .

[27]  J. H. Fan,et al.  Low temperature phase diagram of the Ga1−xInxAsySb1−y system , 1986 .

[28]  R. Ito,et al.  Substrate-Induced Stabilization of GaInPAs Epitaxial Layers on GaAs and InP , 1984 .

[29]  P. Grosse,et al.  Growth of GaInAsSb Alloys by MOCVD and Characterization of GaInAsSb / GaSb p‐n Photodiodes , 1988 .

[30]  F. Karouta,et al.  LPE growth of GaInAsSb/GaSb system: The importance of the sign of the lattice mismatch , 1986 .