Direct laser writing of whispering gallery microcavities by two-photon polymerization

We demonstrate that high-Q polymer whispering gallery microcavities can be directly written by the two-photon polymerization of zirconium/silicon hybrid sol-gel, benefiting from the high spatial resolution and three-dimensional nature of this direct laser writing technique. The quality factors of the fabricated whispering gallery microcavities are up to 1.48×105 limited by the material absorption. The surface roughness is less than 12 nm. This opens the way to fabricate intricate three-dimensional microcavities for the fundamental and applied physics research based on optical resonators.

[1]  Boris N. Chichkov,et al.  Materials processing: Two-photon fabrication , 2009 .

[2]  Xiang Wu,et al.  High Quality Direct Photo-Patterned Microdisk Lasers With Organic–Inorganic Hybrid Materials , 2008 .

[3]  Rajan P Kulkarni,et al.  Label-Free, Single-Molecule Detection with Optical Microcavities , 2007, Science.

[4]  Zheng-Fu Han,et al.  Fabrication of high-Q polydimethylsiloxane optical microspheres for thermal sensing , 2009 .

[5]  Vladimir S. Ilchenko,et al.  CAVITY QED WITH HIGH-Q WHISPERING GALLERY MODES , 1998 .

[6]  Seth R. Marder,et al.  Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication , 1999, Nature.

[7]  Christoph Vannahme,et al.  High-Q conical polymeric microcavities , 2010 .

[8]  Hong Xia,et al.  Remote manipulation of micronanomachines containing magnetic nanoparticles. , 2009, Optics letters.

[9]  Kerry J. Vahala,et al.  Fabrication and coupling to planar high-Q silica disk microcavities , 2003 .

[10]  T. J. Kippenberg,et al.  Ultra-high-Q toroid microcavity on a chip , 2003, Nature.

[11]  A Taflove,et al.  Waveguide-coupled AlGaAs / GaAs microcavity ring and disk resonators with high f inesse and 21.6-nm f ree spectral range. , 1997, Optics letters.

[12]  Satoshi Kawata,et al.  Two-photon laser precision microfabrication and its applications to micro-nano devices and systems , 2003 .

[13]  Lute Maleki,et al.  Nonlinear optics and crystalline whispering gallery mode cavities. , 2004, Physical review letters.

[14]  Martin Wegener,et al.  New Route to Three‐Dimensional Photonic Bandgap Materials: Silicon Double Inversion of Polymer Templates , 2006 .

[15]  C. Fotakis,et al.  Ultra-low shrinkage hybrid photosensitive material for two-photon polymerization microfabrication. , 2008, ACS nano.

[16]  Yan Li,et al.  On chip, high-sensitivity thermal sensor based on high-Q polydimethylsiloxane-coated microresonator , 2010 .

[17]  J. Raimond,et al.  Very low threshold whispering-gallery-mode microsphere laser. , 1996, Physical review. A, Atomic, molecular, and optical physics.

[18]  P. Petroff,et al.  A quantum dot single-photon turnstile device. , 2000, Science.

[19]  M. Wegener,et al.  Gold Helix Photonic Metamaterial as Broadband Circular Polarizer , 2009, Science.

[20]  K. Vahala,et al.  Ultralow loss, high Q, four port resonant couplers for quantum optics and photonics. , 2004, Physical review letters.

[21]  High‐Performance Microring Resonators Fabricated with Multiphoton Absorption Polymerization , 2008 .

[22]  Satoshi Kawata,et al.  Two-photon photopolymerization and 3D lithographic microfabrication , 2005 .

[23]  M. Wegener,et al.  Direct laser writing of three-dimensional photonic-crystal templates for telecommunications , 2004, Nature materials.