Fully Inkjet Printed RF Inductors and Capacitors Using Polymer Dielectric and Silver Conductive Ink With Through Vias

In this paper, fully inkjet printed multilayer capacitors and inductors are fabricated and characterized using poly 4-vinylphenol (PVP) ink as the dielectric layer and silver nanoparticle ink as the conductor. Inkjet printed through vias, created with a novel dissolving method are used to make RF structures in a multilayer inkjet printing process. The vias have been realized in a 350-nm PVP film and exhibit resistance better than 0.1 Ω. Spiral inductors from 10 to 75 nH have been realized with maximum quality factors around five. The 10-nH inductor exhibits a self-resonant frequency slightly below 1 GHz. Metal-insulator-metal capacitors are realized with densities of 50 pF/mm2. These capacitors demonstrate values ranging from 16 to 50 pF. The 16-pF capacitor shows a self-resonant frequency over 1.5 GHz. The successful implementation of inductors and capacitors in an all inkjet printed multilayer process with vias is an important step toward fully inkjet-printed large area and flexible RF systems.

[1]  Vivek Subramanian,et al.  High-quality inkjet-printed multilevel interconnects and inductive components on plastic for ultra-low-cost RFID applications , 2003 .

[2]  Alessandro Chiolerio,et al.  Inkjet printing and low power laser annealing of silver nanoparticle traces for the realization of low resistivity lines for flexible electronics , 2011 .

[3]  Yeong Don Park,et al.  Influence of the dielectric constant of a polyvinyl phenol insulator on the field-effect mobility of a pentacene-based thin-film transistor , 2005 .

[4]  Yunnan Fang,et al.  Inkjet catalyst printing and electroless copper deposition for low-cost patterned microwave passive devices on paper , 2013, Electronic Materials Letters.

[5]  K. Guarini,et al.  High-Resolution Inkjet Printing of All-Polymer Transistor Circuits , 2009 .

[6]  MIM CAPACITOR SIMPLE SCALABLE MODEL DETERMINATION FOR MMIC APPLICATION ON GAAS , 2006 .

[7]  J. Felba,et al.  Nano-silver inkjet printed interconnections through the microvias for flexible electronics , 2011, 2011 11th IEEE International Conference on Nanotechnology.

[8]  Je Hoon Oh,et al.  All-inkjet-printed electrical components and circuit fabrication on a plastic substrate , 2012 .

[9]  Atif Shamim,et al.  Paper-based inkjet-printed ultra-wideband fractal antennas , 2012 .

[10]  A.V. Kordesch,et al.  Performance comparison of MIM capacitors and metal finger capacitors for analog and RF applications , 2004, 2004 RF and Microwave Conference (IEEE Cat. No.04EX924).

[11]  A. Shamim,et al.  Inkjet Printing of Novel Wideband and High Gain Antennas on Low-Cost Paper Substrate , 2012, IEEE Transactions on Antennas and Propagation.

[12]  Vincent Fusco,et al.  A comparison study of EM and physical equivalent circuit modeling for MIM CMOS capacitors , 2002 .

[13]  K. Seol,et al.  Similarities in the electrical conduction processes in hydrogenated amorphous silicon oxynitride and silicon nitride , 2003 .

[14]  P. Ajayan,et al.  Substrate and size effects on the coalescence of small particles , 1991 .

[15]  Kenichi Okada,et al.  Modeling of Spiral Inductors , 2010 .

[16]  Huai-Yuan Tseng,et al.  Scaling of Inkjet-Printed Transistors using Novel Printing Techniques , 2011 .

[17]  Hans-Erik Nilsson,et al.  Electrical Sintering of Silver Nanoparticle Ink Studied by In-Situ TEM Probing , 2011, PloS one.

[18]  A. Shamim,et al.  All inkjet printed 3D microwave capacitors and inductors with vias , 2013, 2013 IEEE MTT-S International Microwave Symposium Digest (MTT).

[19]  Richard H. Friend,et al.  Inkjet Printed Via‐Hole Interconnections and Resistors for All‐Polymer Transistor Circuits , 2001 .

[20]  Vivek Subramanian,et al.  Inkjetted Organic Transistors using a Novel Pentacene Precursor , 2003 .

[21]  V. Subramanian,et al.  An ink-jet-deposited passive component process for RFID , 2004, IEEE Transactions on Electron Devices.

[22]  Calvin Plett,et al.  Radio Frequency Integrated Circuit Design , 2003 .

[23]  Vivek Subramanian,et al.  Fully gravure and ink-jet printed high speed pBTTT organic thin film transistors , 2010 .

[24]  A. Maric,et al.  Low-Cost CPW Meander Inductors Utilizing Ink-Jet Printing on Flexible Substrate for High-Frequency Applications , 2013, IEEE Transactions on Electron Devices.

[25]  M. Tentzeris,et al.  Multi-Layer RF Capacitors on Flexible Substrates Utilizing Inkjet Printed Dielectric Polymers , 2013, IEEE Microwave and Wireless Components Letters.