Ptychographic imaging with a compact gas-discharge plasma extreme ultraviolet light source

1Optoelectronics Research Centre, University of Southampton, SO17 1BJ, United Kingdom 2 RWTH Aachen University, Experimental Physics of EUV, JARA-FIT, Steinbachstrasse 15, 52074 Aachen, Germany 3Forschungszentrum Jülich GmbH, Peter Grünberg Institut (PGI-9), JARA-FIT, 52425 Jülich, Germany 4Department of Physics and Astronomy, and California Nano Systems Institute, University of California, Los Angeles, CA 90095, USA *Corresponding author: mo1e13@soton.ac.uk

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