Fabrication of 64*64 arrayed-waveguide grating multiplexer on silicon

A 64 channel arrayed-waveguide multiplexer with 0.4 nm (50 GHz) channel spacing at 1.55 µm has been fabricated using SiO2/Si waveguides. The authors obtained a crosstalk of less than –27 dB to neighbouring and all other channels. The on-chip insertion loss ranges from 3.1 to 5.7 dB for central and peripheral output ports, respectively.