Signal Measurement and Estimation Techniques for Micro and Nanotechnology.

Signal Measurement and Estimation Techniques for Micro and Nanotechnology provides a state-of-the-art discussion on techniques and solutions to measure and estimate signals at the micro and nano scale. new technologies and applications such as micromanipulation (artificial components, biological objects), micro-assembly (MEMS, MOEMS, NEMS) and material and surface forces characterization are covered. The importance of sensing at the micro and nano scale is presented as a key issue in control systems, as well as for understanding the physical phenomena of these systems.