Vertical air pressure compensation device of multi-degree-of-freedom air floating platform and vertical air pressure compensation method
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A vertical air pressure compensation device of a multi-degree-of-freedom air floating platform and a vertical air pressure compensation method belong to the field of full-physical simulation. In order to solve the problems that an existing vertical air pressure compensation device of the multi-degree-of-freedom air floating platform needs solenoid valves with a plurality of proportions, the structure is complicated, and the control precision of the vertical air pressure compensation method is lower, an air floating shaft comprises an air floating bearing outer sleeve and an air floating bearing inner sleeve, wherein the air floating bearing inner sleeve is mounted in a hollow air cavity of the air floating bearing outer sleeve; the air floating bearing inner sleeve does vertical movement along the inner side wall of the air floating bearing outer sleeve; the upper end of the air floating bearing inner sleeve is connected onto an air floating platform; a plurality of nozzles are mounted on the inner side wall of the air floating bearing outer sleeve; the inner side wall of the air floating bearing outer sleeve is provided with a pressure sensor for measuring pressure of the hollow air cavity; the nozzles and the pressure sensor are located between the lower ends of the air floating bearing inner sleeve and the air floating bearing outer sleeve; a grating ruler for measuring the vertical displacement of the air floating bearing inner sleeve is arranged in the air floating bearing outer sleeve along the axial direction. The vertical air pressure compensation device of the multi-degree-of-freedom air floating platform and the vertical air pressure compensation method are used for full-physical simulation tests.