论文信息 - Comparison between HDP CVD and PECVD silicon nitride for advanced interconnect applications - 字舞流文

Comparison between HDP CVD and PECVD silicon nitride for advanced interconnect applications

M. Liang | W. Chang | S. Jang | A. Karroy | W. Chiou | C. Yu | L. Camilletti | Q.Z. Liu | L. Chao | J. Yota | M. Janani | C. Nguyen | M. D. Woo | J. Hander | P. van Cleemput | L.J. Li