Piezoelectric MEMS for energy harvesting
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Recently, piezoelectric MEMS have been intensively investigated to create new functional microdevices, and some of them have already been commercialized such as MEMS gyrosensors or miropumps of inkjet printer head. Piezoelectric energy harvesting is considered to be one of the promising future applications of piezoelectric MEMS. In this report, we introduce the deposition of the piezoelectric PZT thin films as well as lead-free KNN thin films. We fabricated piezoelectric energy harvesters of PZT and KNN thin films deposited on stainless steel cantilevers and compared their power generation performance.
[1] H. Hida,et al. Lead-Free Piezoelectric MEMS Energy Harvesters of (K,Na)NbO3 Thin Films on Stainless Steel Cantilevers , 2013 .
[2] Robert Puers,et al. Fabrication, modelling and characterization of MEMS piezoelectric vibration harvesters , 2008 .
[3] Kazuhiko Adachi,et al. Power-generation performance of lead-free (K,Na)NbO3 piezoelectric thin-film energy harvesters , 2012 .