Understanding defects in DSA: calculation of free energies of block copolymer DSA systems via thermodynamic integration of a mesoscale block-copolymer model
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Clifford L. Henderson | Peter J. Ludovice | Richard A. Lawson | Andrew J. Peters | Benjamin D. Nation
[1] Glenn H. Fredrickson,et al. Defectivity study of directed self-assembly of cylindrical diblock copolymers in laterally confined thin channels , 2013, Advanced Lithography.
[2] Dieter Van Den Heuvel,et al. Defect source analysis of directed self-assembly process (DSA of DSA) , 2013, Advanced Lithography.
[3] Clifford L. Henderson,et al. Detailed molecular dynamics studies of block copolymer directed self-assembly: Effect of guiding layer properties , 2013 .
[4] G. Fredrickson,et al. Block Copolymers—Designer Soft Materials , 1999 .
[5] P. Nealey,et al. Theoretically informed coarse grain simulations of block copolymer melts: method and applications , 2009 .
[6] Kris T. Delaney,et al. Self-consistent field theory of directed self-assembly in laterally confined lamellae-forming diblock copolymers , 2012, Advanced Lithography.
[7] Christopher Harrison,et al. Block copolymer lithography: Periodic arrays of ~1011 holes in 1 square centimeter , 1997 .
[8] Clifford L. Henderson,et al. Coarse grained molecular dynamics model of block copolymer directed self-assembly , 2013 .
[9] Joel K. W. Yang,et al. Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates , 2008, Science.
[10] Joshua A. Anderson,et al. General purpose molecular dynamics simulations fully implemented on graphics processing units , 2008, J. Comput. Phys..
[11] Clifford L. Henderson,et al. Effects of block copolymer polydispersity and χN on pattern line edge roughness and line width roughness from directed self-assembly of diblock copolymers , 2013, Advanced Lithography.
[12] Juan J. de Pablo,et al. Free Energy of Defects in Ordered Assemblies of Block Copolymer Domains. , 2012, ACS macro letters.
[13] G. Fredrickson,et al. Defectivity in Laterally Confined Lamella-Forming Diblock Copolymers: Thermodynamic and Kinetic Aspects , 2012 .
[14] Clifford L. Henderson,et al. Development of realistic potentials for the simulation of directed self-assembly of PS-PMMA di-block copolymers , 2011, Advanced Lithography.
[15] Ofir Montal,et al. Directed self-assembly defectivity assessment. Part II , 2012, Advanced Lithography.
[16] Soojin Park,et al. Macroscopic 10-Terabit–per–Square-Inch Arrays from Block Copolymers with Lateral Order , 2009, Science.
[17] Marcus Müller,et al. Calculating the free energy of self-assembled structures by thermodynamic integration. , 2008, The Journal of chemical physics.