Dependence of capacitance on electrode configuration for ferroelectric films with interdigital electrodes

The dependence of the capacitance of ferroelectric film-based interdigital capacitors (IDC) on the electrode configuration has been investigated using the Gevorgiann model. The electrode spacing, width, overlapping length, thickness and electrode 'finger' number have different influences on the capacitance. The calculation results were fitted for a semi-quantitative description of the capacitance relationship with each of these parameters, which is expected to be helpful for interdigital device design, development, and evaluation.