论文信息 - Towards a full integration of vertically aligned silicon nanowires in MEMS using silane as a precursor - 字舞流文

Towards a full integration of vertically aligned silicon nanowires in MEMS using silane as a precursor

A. Tarancón | D. Dávila | M. Salleras | C. Calaza | L. Fonseca | G. Gadea | A. Morata | J. D. Santos | Á. Morata | J. Santos | J. D. Santos