Signal Detection of Bulk-Silicon Capacitive Dual-Axis Micro-Accelerometers
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A novel signal detection method fit for capacitive dual-axis micro-accelerometers is presented based on the research of the bulk-silicon capacitive dual-axis accelerometer's structure and the analysis of differential capacitance detection method. This method could efficiently output the mixed signals on the two axes respectively. Its feasibility is verified by the simulation using HSPICE. Based on CSMC 0.5 mum n well DPDM process SPICE BSIM3 MOS model (LEVEL=49) at 5 V power supply, the results of simulation are respectively, single-sensitivity 50 mV/g, frequency respond 2.3 kHz, and measurement scale plusmn50g.
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