Spectral responsivity calibration of silicon photodetectors using monochromator-based cryogenic radiometer

Cryogenic radiometer is the most accurate measurement setup for optical power measurement, underpinning the radiometry and photometry standards in many countries around the world. Typically cryogenic radiometers are designed for laser injection, and the measurement uncertainty at the laser wavelengths can reach 10-4. The National Institute of Metrology China has used the laser cryogenic radiometer to realize the absolute spectral responsivity of the detectors. In order to achieve spectral responsivity measurement ability in a wider spectral range, we establish the new spectral type cryogenic radiometer system using a supercontinuum white light source and a double monochromator, covering spectral range of 400 nm - 1100 nm. Establishment of the new cryogenic radiometer will greatly enhance the entire optical radiation measurement capablities, such as radiation illuminance and luminance measurement. A series of experiments have been undertaken, including measurement of noise level, heating equivalence, wavelength calibration, power stabilization, detector characteristics measurement, and different light source spectral radiation power measurement. The measurement uncertainties are analyzed and presented.