Review on micro molding of thermoplastic polymers

Molding of micro components from thermoplastic polymers has become a routinely used industrial production process. This paper describes both the more than 30-year-old history and the present state of development and applications. Hot embossing, injection molding, reaction injection molding, injection compression molding, thermoforming, and various types of tool fabrication are introduced and their advantages and drawbacks are discussed. In addition, design considerations, process limitations, and commercially available micro molding machines are presented.

[1]  W. Benecke,et al.  Silicon Moulds for Micro‐Injection Moulding Techniques , 2006 .

[2]  A. Heuberger,et al.  Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics , 1982, Naturwissenschaften.

[3]  M. Worgull,et al.  New aspects of simulation in hot embossing , 2003, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003..

[4]  X. Shan,et al.  Development of a low-cost 8/spl times/8 optical switch using micro hot embossing , 2002, IEEE/LEOS International Conference on Optical MEMs.

[5]  Sung-Keun Lee,et al.  Microlenses array fabrication by hot embossing process , 2002, IEEE/LEOS International Conference on Optical MEMs.

[6]  V. Studer,et al.  Room-temperature and low-pressure nanoimprint lithography , 2002 .

[7]  H. Schift,et al.  Chemical nano-patterning using hot embossing lithography , 2002 .

[8]  C. Vieu,et al.  Using polydimethylsiloxane as a thermocurable resist for a soft imprint lithography process , 2002 .

[9]  Hella-Christin Scheer,et al.  First and second generation purely thermoset stamps for hot embossing , 2002 .

[10]  Marc Schnieper,et al.  Nano-structured anti-reflective surfaces replicated by hot embossing , 2002 .

[11]  Th. Schaller,et al.  Micromolded easy-assembly multi fiber connector: RibCon® , 2002 .

[12]  M. Heckele,et al.  Hot embossing of microstructures with integrated conduction paths for the production of lab-on-chip systems , 2002, Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS.

[13]  N. S. Ong,et al.  Microlens array produced using hot embossing process , 2002 .

[14]  Innovative concept for the fabrication of micromechanical sensor and actuator devices using selectively metallized polymers , 2002 .

[15]  Liwei Lin,et al.  Microplastic embossing process: experimental and theoretical characterizations ☆ , 2002 .

[16]  Andreas E. Guber,et al.  Microfabrication of single-use plastic microfluidic devices for high-throughput screening and DNA analysis , 2002 .

[17]  Volker Wittwer,et al.  Periodic microstructures for large area applications generated by holography , 2001, SPIE Optics + Photonics.

[18]  David B. Rhine,et al.  Fabrication of microfluidic devices in silicon and plastic using plasma etching , 2001 .

[19]  Hiroshi Goto,et al.  Optical switch array based on microforming process , 2001, SPIE Micro + Nano Materials, Devices, and Applications.

[20]  G. E. Hammer A new look at the steel cord–rubber adhesive interphase by chemical depth profiling , 2001 .

[21]  Stefan Lehmacher,et al.  Polymer optical waveguides integrated in printed circuit boards , 2001, Proceedings 27th European Conference on Optical Communication (Cat. No.01TH8551).

[22]  Jost Goettert,et al.  Multilevel microstructures and mold inserts fabricated with planar and oblique x-ray lithography of SU-8 negative photoresist , 2001, SPIE MOEMS-MEMS.

[23]  Hella-Christin Scheer,et al.  Nanoimprint lithography with a commercial 4-in. bond system for hot embossing , 2001, SPIE Advanced Lithography.

[24]  Andreas Neyer,et al.  A new PMMA-microchip device for isotachophoresis with integrated conductivity detector , 2001 .

[25]  M. Heckele,et al.  Microstructured through-holes in plastic films by hot embossing , 2001 .

[26]  Microfluidic biochips for cell guidance and separation , 2000, 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.00EX451).

[27]  Ulrike Wallrabe,et al.  LIGA technology today and its industrial applications , 2000, SPIE Optics East.

[28]  Gwo-Bin Lee,et al.  Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection , 2000, SPIE MOEMS-MEMS.

[29]  H. Dreuth,et al.  Thermoplastic structuring of thin polymer films , 1999 .

[30]  Ruey Fang Shyu,et al.  Realization of fabricating microlens array in mass production , 1999, Optical Systems Design.

[31]  Werner Karl Schomburg,et al.  AMANDA—surface micromachining, molding, and diaphragm transfer , 1999 .

[32]  Holger Becker,et al.  Microfluidic devices for μ-TAS applications fabricated by polymer hot embossing , 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[33]  Walter Bacher,et al.  Hot embossing - The molding technique for plastic microstructures , 1998 .

[34]  Liwei Lin,et al.  Comparative study of hot embossed micro structures fabricated by laboratory and commercial environments , 1998 .

[35]  Werner Karl Schomburg,et al.  Strain gauge pressure and volume-flow transducers made by thermoplastic molding and membrane transfer , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[36]  J. Mohr,et al.  LIGA : A technology for fabricating microstructures and microsystems , 1998 .

[37]  P. McNally,et al.  A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs , 1998 .

[38]  R. G. Christensen,et al.  Fabrication of plastic microfluid channels by imprinting methods. , 1997, Analytical chemistry.

[39]  Thomas G. Harvey Replication techniques for micro-optics , 1997, Other Conferences.

[40]  Andreas Neyer,et al.  Precision molding techniques for optical waveguide devices , 1997, Optics & Photonics.

[41]  Werner Karl Schomburg,et al.  An electrostatically actuated polymer microvalve equipped with a movable membrane electrode , 1997 .

[42]  R. McCormick,et al.  Microchannel electrophoretic separations of DNA in injection-molded plastic substrates. , 1997, Analytical chemistry.

[43]  G. Stemme,et al.  Valve-less diffuser micropumps fabricated using thermoplastic replication , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

[44]  Kenneth A. Haines,et al.  Development of embossed holograms , 1996, Electronic Imaging.

[45]  W. Menz,et al.  Microvalves with bistable buckled polymer diaphragms , 1996 .

[46]  D. Maas,et al.  Fabrication of microcomponents using adhesive bonding techniques , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[47]  Stephen Y. Chou,et al.  Imprint of sub-25 nm vias and trenches in polymers , 1995 .

[48]  Werner Karl Schomburg,et al.  A microvalve system fabricated by thermoplastic molding , 1995 .

[49]  Molding of LIGA microstructures from fluorinated polymers , 1995 .

[50]  W. Ehrfeld,et al.  Micro-optical components for fiber and integrated optics realized by the LIGA technique , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

[51]  W. Bacher,et al.  Molding process with high alignment precision for the LIGA technology , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

[52]  Rino E. Kunz,et al.  Replicated microstructures for integrated optics , 1994, Integrated Optoelectronics.

[53]  Rino E. Kunz,et al.  High-precision molding of integrated optical structures , 1993, Optics & Photonics.

[54]  Robert Ruprecht,et al.  Abformung von Mikrostrukturen auf prozessierten Wafern , 1993 .

[55]  W. Menz,et al.  The LIGA technique-A novel concept for microstructures and the combination with Si-technologies by injection molding , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[56]  M. T. Gale,et al.  ZOD Micro-Images: Colour and Black-and-White Image Reproduction from Surface Relief Grating Structures , 1978 .

[57]  Karl Knop,et al.  Color pictures using the zero diffraction order of phase grating structures , 1976 .

[58]  R. E. Flory,et al.  HoloTape®: A Low-Cost Prerecorded Television System Using Holographic Storage , 1973 .

[59]  E. A. Franke,et al.  Embossed Optical Waveguides , 1972 .

[60]  M. Lurie,et al.  Embossed hologram motion pictures for television playback. , 1970, Applied Optics.