Smart spare parts management systems in semiconductor manufacturing

The purpose of this paper is to propose a smart spare parts inventory management system for a semiconductor manufacturing company.,With the development of the Internet of Things and big data analytics, more information can be obtained and shared between fabs and suppliers.,On the basis of the characteristics of spare parts, the authors classify the spare parts into two types, the consumable and contingent parts, and manage them through a cyber-physical inventory management system.,In this new business model, the real time information from machines, shop floors, spare parts database and suppliers are used to make better decisions and establish transparency and flexibility between fabs and suppliers.