论文信息 - Rigorous coupled-wave analysis for multilayered grating structures

Rigorous coupled-wave analysis for multilayered grating structures

A numerically stable and systematic implementation of the rigorous coupled-wave analysis (RCWA) for the general multilayered grating structures is presented for both TE and TM modes. Numerical results of the approach are shown for the diffraction-based optical device as an example and are compared with the scalar diffraction method to illustrate the limited applicability of the scalar analysis.

Fahrettin Levent Degertekin | W. Lee | F. Degertekin | W. Lee

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