An efficient numerical technique for electrochemical simulation of complicated microelectromechanical structures

Abstract An efficient algorithm for self-consistent analysis of three-dimensional (3-D) microelectromechanical systems (MEMS) is described. The algorithm employs a hybrid finite-element/boundary-element technique for coupled mechanical and electrical analysis. The nonlinear coupled equations are solved by employing a Newton-GMRES technique. The coupled algorithm is shown to converge rapidly and is much faster than relaxation for tightly coupled cases.

[1]  Jacob K. White,et al.  A Precorrected-fft Method For Capacitance Extraction of Complicated 3-D Structures , 1994, IEEE/ACM International Conference on Computer-Aided Design.

[2]  Y. Saad,et al.  GMRES: a generalized minimal residual algorithm for solving nonsymmetric linear systems , 1986 .

[3]  K. Bathe,et al.  FINITE ELEMENT FORMULATIONS FOR LARGE DEFORMATION DYNAMIC ANALYSIS , 1975 .

[4]  S. Senturia,et al.  3D coupled electro-mechanics for MEMS: applications of CoSolve-EM , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

[5]  Tapan K. Sarkar,et al.  The Electrostatic Field of Conducting Bodies in Multiple Dielectric Media , 1984 .

[6]  H. Yie,et al.  Convergence properties of relaxation versus the surface-Newton generalized-conjugate residual algorithm for self-consistent electromechanical analysis of 3-D micro-electro-mechanical structures , 1994, Proceedings of International Workshop on Numerical Modeling of processes and Devices for Integrated Circuits: NUPAD V.

[7]  A. Ruehli,et al.  Efficient Capacitance Calculations for Three-Dimensional Multiconductor Systems , 1973 .

[8]  Jacob K. White,et al.  FastCap: a multipole accelerated 3-D capacitance extraction program , 1991, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[9]  Jacob K. White,et al.  A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures , 1993, Proceedings of 1993 International Conference on Computer Aided Design (ICCAD).

[10]  J. Hess,et al.  Calculation of potential flow about arbitrary bodies , 1967 .

[11]  Philip E. Gill,et al.  Practical optimization , 1981 .

[12]  J. Funk,et al.  New convergence scheme for self-consistent electromechanical analysis of iMEMS , 1995, Proceedings of International Electron Devices Meeting.