Design and use of a vacuum system for high rate reactive sputtering of TiO2/TiN/TiO2 solar control films

Abstract The compound metal TiN shows solar selective properties both in bulk and thin film form. It has previously been suggested that thin films of TiN, when anti-reflected by TiO 2 layers, would form a hard and durable solar selective coating. We have made such multi-layer films and report on their properties. This paper also describes a new sputter coater and gives details of its design and performance. Features of this coater include a high pumping rate to give stable reactive sputtering and a load lock system to provide a high productivity of samples.