论文信息 - Fabrication of Achromatic Infrared Wave Plate by Direct Imprinting Process on Chalcogenide Glass

Fabrication of Achromatic Infrared Wave Plate by Direct Imprinting Process on Chalcogenide Glass

An achromatic infrared wave plate was fabricated by forming a subwavelength grating on the chalcogenide glass using direct imprint lithography. A low toxic chalcogenide glass (Sb?Ge?Sn?S system) substrate was imprinted with a grating of 1.63-?m depth, a fill factor of 0.7, and 3-?m period using glassy carbon as a mold at 253 ?C and 3.8 MPa. Phase retardation of the element reached around 30? at 8.5?10.5 ?m wavelengths, and the transmittance exceeded that of a flat substrate over 8 ?m wavelength. Fabrication of the mid-infrared wave plate is thereby less expensive than that of conventional crystalline wave plates.

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