Low-temperature PECVD of nanodevice-Grade nc-3C-SiC
暂无分享,去创建一个
Kostya Ostrikov | S. Xu | K. Ostrikov | Shuyan Xu | Q. J. Cheng | J. Long | J. Long | Q. Cheng
[1] J. Sturm,et al. Low temperature chemical vapor deposition growth of β-SiC on (100) Si using methylsilane and device characteristics , 1997 .
[2] V. Dalal,et al. Influence of pressure and ion bombardment on the growth and properties of nanocrystalline silicon materials , 2004 .
[3] W. Fuß,et al. Chemical vapor deposition of silicon carbide powders using pulsed CO2 Lasers , 1993 .
[4] I. Bello,et al. Epitaxy on Diamond by Chemical Vapor Deposition: A Route to High‐Quality Cubic Boron Nitride for Electronic Applications , 2004 .
[5] M. Mehregany,et al. The mechanical properties of polycrystalline 3C-SiC films grown on polysilicon substrates by atmospheric pressure chemical-vapor deposition , 2006 .
[6] Y. Tawada,et al. Wide band‐gap hydrogenated amorphous silicon carbide prepared from a liquid aromatic carbon source , 1992 .
[7] L. Gregoratti,et al. Bottom–Up Fabrication of Carbon‐Rich Silicon Carbide Nanowires by Manipulation of Nanometer‐Sized Ethanol Menisci , 2005 .
[8] Fabrice Gourbilleau,et al. Low temperature deposition of nanocrystalline silicon carbide thin films , 2000 .
[9] M. Scarselli,et al. XPS and STM study of SiC synthesized by acetylene and disilane reaction with the Si(1 0 0)2 × 1 surface , 2005 .
[10] Feng Liao,et al. Superhard nanocrystalline silicon carbide films , 2005 .
[11] R. Rizk,et al. Influence of substrate temperature on growth of nanocrystalline silicon carbide by reactive magnetron sputtering , 2005 .
[12] M. Ervin,et al. Effects of the Addition of Silane during Carbonization on the Epitaxy of 3C-SiC on Si , 2002 .
[13] Y. Kohtoku,et al. A Tough, Thermally Conductive Silicon Carbide Composite with High Strength up to 1600°C in Air , 1998 .
[14] K. Ostrikov,et al. Deterministic plasma-aided synthesis of high-quality nanoislanded nc-SiC films , 2007 .
[15] Kostya Ostrikov,et al. Colloquium: Reactive plasmas as a versatile nanofabrication tool , 2005 .
[16] Q. Wahab,et al. Growth of epitaxial 3C‐SiC films on (111) silicon substrates at 850 °C by reactive magnetron sputtering , 1993 .
[17] S. Logothetidis,et al. Dielectric function and reflectivity of 3C–silicon carbide and the component perpendicular to the c axis of 6H–silicon carbide in the energy region 1.5–9.5 eV , 1996 .
[18] F. C. Loh,et al. Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films , 1998 .
[19] J. Gasiot,et al. A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film , 1976 .
[20] Igor Levchenko,et al. Surface fluxes of Si and C adatoms at initial growth stages of SiC quantum dots , 2007 .
[21] J. Wigmore,et al. Characterization of 3C-SiC films grown on monocrystalline Si by reactive hydrogen plasma sputtering , 1997 .
[22] Y. Li,et al. Improvement of the optical and photoelectric properties of hydrogenated amorphous silicon‐carbon alloys by using trisilylmethane as a feedstock , 1991 .
[23] Eray S. Aydil,et al. Mechanism of hydrogen-induced crystallization of amorphous silicon , 2002, Nature.
[24] G.‐C. Yi,et al. Heteroepitaxial Growth of High‐Quality GaN Thin Films on Si Substrates Coated with Self‐Assembled Sub‐micrometer‐sized Silica Balls , 2006 .
[25] Qing Peng,et al. A general strategy for nanocrystal synthesis , 2005, Nature.
[26] Solomon,et al. Selective low-power plasma decomposition of silane-methane mixtures for the preparation of methylated amorphous silicon. , 1988, Physical review. B, Condensed matter.
[27] Partha S. Dutta,et al. Low temperature deposition of nanocrystalline silicon carbide films by plasma enhanced chemical vapor deposition and their structural and optical characterization , 2003 .
[28] I. R. Jones,et al. Low-frequency, high-density, inductively coupled plasma sources: Operation and applications , 2001 .
[29] Yahong Xie,et al. Single‐Step Fabrication of Nickel Films with Arrayed Macropores and Nanostructured Skeletons , 2006 .
[30] Igor Levchenko,et al. Control of core-shell structure and elemental composition of binary quantum dots , 2007 .
[31] Cheong Hoong Diong,et al. RF plasma sputtering deposition of hydroxyapatite bioceramics : synthesis, performance, and biocompatibility , 2005 .