Modeling of pyrolytic laser‐assisted chemical vapor deposition: Mass transfer and kinetic effects influencing the shape of the deposit

The laser‐assisted chemical vapor deposition of metals is modeled. The case of pyrolytic deposition induced by a continuous laser source is considered. The heat transfer in the solid substrate is considered to be transient, while the gas‐phase heat and mass transfer are assumed to be in the quasi‐steady state. The model accommodates the use of temperature‐dependent physical properties and the occurrence of irregularly shaped deposits. The modeling equations are solved by a finite element approach which is briefly described. Volcanolike deposits are predicted under certain conditions of gas pressure and laser intensity. Model predictions show that depletion effects and adsorption‐desorption phenomena are major factors in influencing the occurrence of volcanolike deposits.

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