Modeling of pyrolytic laser‐assisted chemical vapor deposition: Mass transfer and kinetic effects influencing the shape of the deposit
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[1] C. F. Curtiss,et al. Molecular Theory Of Gases And Liquids , 1954 .
[2] J. Oxley,et al. Kinetics of the heterogeneous decomposition of nickel tetracarbonyl , 1967 .
[3] James J. Carberry,et al. Chemical and catalytic reaction engineering , 1976 .
[4] Melvin Lax,et al. Temperature rise induced by a laser beam , 1977 .
[5] J. Z. Zhu,et al. The finite element method , 1977 .
[6] T. R. Anthony,et al. Heat treating and melting material with a scanning laser or electron beam , 1977 .
[7] James F. Gibbons,et al. Temperature distributions produced in semiconductors by a scanning elliptical or circular cw laser beam , 1980 .
[8] K. Morgan,et al. Recent advances in numerical methods in fluids , 1980 .
[9] Susan D. Allen,et al. Laser chemical vapor deposition: A technique for selective area deposition , 1981 .
[10] I. Herman,et al. Wafer-Scale Laser Lithography: I. Pyrolytic Deposition of Metal Microstructures , 1982 .
[11] S. Allen,et al. Direct Writing Using Laser Chemical Vapor Deposition , 1982 .
[12] J. Tsao,et al. Laser Fabrication of Microstructures: Effect of Geometrical Scaling on Chemical Reaction Rates , 1982 .
[13] I. Calder,et al. Modeling of cw laser annealing of multilayer structures , 1982 .
[14] S. Gupta,et al. Temperature profiles in a two-component heterogeneous system heated with a cw laser , 1982 .
[15] J. Flaherty,et al. An Adaptive Finite Element Method for Initial-Boundary Value Problems for Partial Differential Equations , 1982 .
[16] R. Hendel,et al. Temperature profiles induced by a scanning cw laser beam , 1982 .
[17] H. Cline. An analysis of the process of recrystallization of silicon thin films with either a scanning laser or strip heater , 1983 .
[18] R. Pease,et al. Temperature profiles in solid targets irradiated with finely focused beams , 1983 .
[19] Klaus Piglmayer,et al. Temperature Distributions in CW Laser Induced Pyrolytic Deposition , 1983 .
[20] Daniel J. Ehrlich,et al. A review of laser–microchemical processing , 1983 .
[21] Dieter Bäuerle,et al. Laser Processing and Diagnostics , 1984 .
[22] D. Bäuerle,et al. Lateral growth rates in laser CVD of microstructures , 1984 .
[23] S. Kishida,et al. Laser induced metal deposition from organometallic solution , 1984 .
[24] F. Houle,et al. Laser chemical vapor deposition of copper , 1985 .
[25] T. H. Baum,et al. Laser chemical vapor deposition of gold , 1985 .
[26] R. Salathé,et al. Laser generated microstructures , 1985 .
[27] E. Liarokapis,et al. Temperature rise induced by a cw laser beam revisited , 1985 .
[28] T. H. Baum,et al. LCVD of copper: Deposition rates and deposit shapes , 1986 .
[29] E. F. Elshehawey,et al. Heating a slab induced by a time‐dependent laser irradiance—An exact solution , 1986 .
[30] T. H. Baum,et al. Laser chemical vapor deposition of gold: Part II , 1986 .
[31] Susan D. Allen,et al. Transient Nonlinear Laser Heating and Deposition: A Comparison of Theory and Experiment , 1986, Topical Meeting on Microphysics of Surfaces, Beams, and Adsorbates.