Revealing features of different optical shaping technologies by a point diffraction interferometer
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Maciej Trusiak | Heidi Ottevaere | Małgorzata Kujawińska | Kamil Liżewski | Nikolay Voznesenskiy | Mariia Voznesenskaia | Diwaker Jha
[1] Kazuya Ota,et al. Development of the point diffraction interferometer for extreme ultraviolet lithography: Design, fabrication, and evaluation , 2002 .
[2] Jannick P. Rolland,et al. Freeform optics: Evolution? No, revolution! , 2012 .
[3] O. Yasushi,et al. Phase-Shifting Point Diffraction Interferometer Having Two Point Light Sources of Single-Mode Optical Fibers , 2012 .
[4] Rongguang Liang,et al. Point Diffraction Interferometry , 2017 .
[5] Kenneth A. Goldberg. EUV Optical Testing , 2008 .
[6] Bing Li,et al. Diffraction wavefront analysis of point diffraction interferometer for measurement of aspherical surface , 2010, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).
[7] Maciej Trusiak,et al. Optical methods for measurements of surface shape in optical components for high power laser beam forming , 2016, Laser Technology Poland.
[8] N. I. Chkhalo,et al. Manufacturing and investigation of objective lens for ultrahigh resolution lithography facilities , 2008, International Conference on Micro- and Nano-Electronics.
[9] Jie Yu,et al. Point diffraction interferometry based on the use of two pinholes , 2015, Optical Metrology.
[10] Kazuya Ota,et al. Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror , 2002 .