Design aspects and performance evaluation of a planar magnetron
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[1] K. Chopra,et al. Simple planar magnetron sputtering source , 1987 .
[2] A. Nyaiesh. The characteristics of a planar magnetron operated at a high power input , 1981 .
[3] C. Elphick. The construction of small planar magnetrons for sputtering use , 1981 .
[4] G. Samuel,et al. Substrate floating potential characteristics in planar magnetron and ht sputtering systems , 1980 .