Novel multiphase chemical reaction systems enabled by microfabrication technology

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2001.

[1]  Jandeleit,et al.  Combinatorial Materials Science and Catalysis. , 1999, Angewandte Chemie.

[2]  Faïçal Larachi,et al.  High-Pressure Trickle-Bed Reactors: A Review , 1997 .

[3]  J. Anderson,et al.  Introduction to Characterization and Testing of Catalysts , 1986 .

[4]  M. Schmidt,et al.  Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher , 1999 .

[5]  Michael P. Harold,et al.  Micromachined reactors for catalytic partial oxidation reactions , 1997 .

[6]  W. Ehrfeld,et al.  Sensor Controlled Processes In Chemical Microreactors , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[7]  A. Brownstein.  1,4-BUTANEDIOL AND TETRAHYDROFURAN : EXEMPLARY SMALL-VOLUME COMMODITIES , 1991 .

[8]  D. Löffler,et al.  Catalytic hydrogenation of cyclohexene. VI: Turnover rate of the gas-phase reaction on unsupported platinum powders , 1985 .

[9]  Paul Watts,et al.  The application of micro reactors to synthetic chemistry , 2001 .

[10]  J. M. Smith,et al.  Trickle‐bed reactors: A review , 1983 .

[11]  G. Taylor.  Deposition of a viscous fluid on the wall of a tube , 1961, Journal of Fluid Mechanics.

[12]  Wolfgang Ehrfeld,et al.  Characterization of Mixing in Micromixers by a Test Reaction: Single Mixing Units and Mixer Arrays , 1999 .

[13]  T. Zhao,et al.  Taylor bubbles in miniaturized circular and noncircular channels , 2001 .

[14]  M. Aramendía,et al.  Transformation of cyclohexene on palladium catalysts : activity and deactivation , 2000 .

[15]  S. D. Collins,et al.  Porous silicon formation mechanisms , 1992 .

[16]  Israel Schechter,et al.  Gas sensing properties of porous silicon , 1995 .

[17]  I. Hsing,et al.  Detailed characterization of anodic bonding process between glass and thin-film coated silicon substrates , 2000 .

[18]  Charles N. Satterfield,et al.  Trickle‐bed reactors , 1975 .

[19]  Zengin,et al.  High-Throughput Testing of Heterogeneous Catalyst Libraries Using Array Microreactors and Mass Spectrometry. , 1999, Angewandte Chemie.

[20]  Italo Mazzarino.  A comparative study of sandwich cross-flow and random catalytic packings for multiphase chemical reactors , 1999 .

[21]  Charles N. Satterfield,et al.  Mass transfer in heterogeneous catalysis , 1969 .

[22]  K. Jensen,et al.  A Micro Packed-Bed Reactor for Chemical Synthesis , 2000 .

[23]  M. Harold,et al.  Dynamic effects of vaporization with exothermic reaction in a porous catalytic pellet , 1993 .

[24]  J C Middleton.  Chapter 15 – Gas–liquid dispersion and mixing , 1992 .

[25]  D. Hönicke.  Microchemical reactors for heterogeneously catalyzed reactions , 1999 .

[26]  G. Somorjai,et al.  Liquid-Phase Hydrogenation of Cyclohexene over Pt Foil Catalysts , 1996 .

[27]  Michael J. Sailor,et al.  Integration of porous silicon chips in an electronic artificial nose , 2000 .

[28]  Yuchun Wang,et al.  Surface modification of micromachined silicon filters , 2000 .

[29]  H. O. Pritchard,et al.  Thermodynamics of phosgene formation from carbon monoxide and chlorine , 1970 .

[30]  Sharka M. Prokes,et al.  The Formation, Morphology, and Optical Properties of Porous Silicon Structures , 1992 .

[31]  Peter Petrik,et al.  Ellipsometric characterization of oxidized porous silicon layer structures , 2000 .

[32]  Porous Silicon Carrier Matrices in Micro Enzyme Reactors-Influence of Matrix Depth , 1999 .

[33]  Klavs F. Jensen,et al.  Microchemical systems: Status, challenges, and opportunities , 1999 .

[34]  M. Schmidt,et al.  Microfabrication of high-temperature silicon devices using wafer bonding and deep reactive ion etching , 1999 .

[35]  Thomas Laurell,et al.  Porous silicon as the carrier matrix in microstructured enzyme reactors yielding high enzyme activities , 1997 .

[36]  J. Federici,et al.  Photolithographic patterning of porous silicon using silicon nitride and silicon carbide masks , 1995 .

[37]  J. Michael Ramsey,et al.  Solid phase extraction on microfluidic devices , 2000 .

[38]  Milorad P. Dudukovic,et al.  Multiphase reactors – revisited , 1999 .

[39]  R. Srinivasan.  Microfabricated reactors for partial oxidation reactions , 1998 .

[40]  I Lundström,et al.  Monitoring specific interaction of low molecular weight biomolecules on oxidized porous silicon using ellipsometry. , 1998, Biosensors & bioelectronics.

[41]  Dorian Liepmann,et al.  PLANAR LAMINAR MIXER , 2000 .

[42]  Klavs F. Jensen,et al.  Design issues for membrane-based, gas phase microchemical systems , 2000 .

[43]  Robin H. Liu,et al.  Passive mixing in a three-dimensional serpentine microchannel , 2000, Journal of Microelectromechanical Systems.

[44]  Mitsutoshi Nakajima,et al.  The effect of the hydrophobicity of microchannels and components in water and oil phases on droplet formation in microchannel water-in-oil emulsification , 2001 .

[45]  Novel prevention method of stiction using silicon anodization for SOI structure , 1999 .

[46]  D. Beebe,et al.  Surface-directed liquid flow inside microchannels. , 2001, Science.

[47]  F. Regnier,et al.  Microfabricated filters for microfluidic analytical systems. , 1999, Analytical chemistry.

[48]  F. Delannay.  Characterization of heterogeneous catalysts , 1984 .

[49]  W. Deen.  Analysis Of Transport Phenomena , 1998 .

[50]  S. Shoji.  Micro Total Analysis Systems , 1999 .

[51]  Yatish T. Shah,et al.  Gas-liquid-solid reactor design , 1979 .

[52]  Mikio Suo,et al.  Two phase flow in capillary tubes , 1964 .

[53]  R. Muller,et al.  Chemical Surface Modification of Porous Silicon , 1993 .

[54]  Brian N. Johnson,et al.  An integrated nanoliter DNA analysis device. , 1998, Science.

[55]  Tohru Fukano,et al.  Characteristics of gas-liquid two-phase flow in a capillary tube , 1993 .

[56]  Raghunath V. Chaudhari,et al.  Multiphase catalytic reactor engineering and design for pharmaceuticals and fine chemicals , 1997 .

[57]  Rüdiger Lange,et al.  Mass transfer in trickle-bed reactors at low reynolds number , 1981 .

[58]  M. Cima,et al.  A controlled-release microchip , 1999, Nature.

[59]  John M. Winterbottom,et al.  Catalytic hydrogenation in a packed bed bubble column reactor , 1999 .

[60]  F. Regnier,et al.  Microfabricated liquid chromatography columns based on collocated monolith support structures. , 1998, Journal of pharmaceutical and biomedical analysis.

[61]  Klavs F. Jensen,et al.  Novel Liquid Phase Microreactors for Safe Production of Hazardous Specialty Chemicals , 2000 .

[62]  K. Jensen,et al.  Investigation of high-temperature degradation of platinum thin films with an in situ resistance measurement apparatus , 1998 .

[63]  M. Schmidt.  Wafer-to-wafer bonding for microstructure formation , 1998, Proc. IEEE.

[64]  Selim Senkan,et al.  Combinatorial Heterogeneous Catalysis-A New Path in an Old Field. , 2001, Angewandte Chemie.

[65]  William A. Mcmillan,et al.  Rapid, automated nucleic acid probe assays using silicon microstructures for nucleic acid concentration. , 1999, Journal of biomechanical engineering.

[66]  Neima Brauner,et al.  Identification of the range of ‘small diameters’ conduits, regarding two-phase flow pattern transitions , 1992 .

[67]  Victor J. Kehrer,et al.  Chemisorption of carbon monoxide on metal surfaces by pulse chromatography , 1969 .

[68]  Said I. Abdel-Khalik,et al.  Gas–liquid two-phase flow in microchannels Part I: two-phase flow patterns , 1999 .

[69]  S.-Y. Lee,et al.  Succeed at gas/liquid contacting , 1999 .

[70]  F. Muller,et al.  Anodic Oxidation of Porous Silicon Layers Formed on Lightly p‐Doped Substrates , 1991 .

[71]  Leigh T. Canham,et al.  Properties of Porous Silicon , 1998 .

[72]  Thomas Laurell,et al.  Enhanced enzyme activity in silicon integrated enzyme reactors utilizing porous silicon as the coupling matrix , 1996 .

[73]  Thomas K. Sherwood,et al.  Mass transfer limitations in a trickle‐bed reactor , 1969 .

[74]  V. Strikha,et al.  A study of hydrogen detection with palladium modified porous silicon , 1998 .

[75]  Geoffrey I. Webb,et al.  Supported Metal Catalysts: Preparation, Characterization, and Function: I. Preparation and Physical Characterization of Platinum Catalysts , 1993 .

[76]  Ferdi Schüth,et al.  The Controlled Oxidation of Hydrogen from an Explosive Mixture of Gases Using a Microstructured Reactor/Heat Exchanger and Pt/Al2O3 Catalyst , 2000 .

[77]  W. Ehrfeld,et al.  Microreactors for Chemical Synthesis and Biotechnology - Current Developments and Future Applications , 1998 .

[78]  Andreas Manz,et al.  Towards miniaturized electrophoresis and chemical analysis systems on silicon: an alternative to chemical sensors , 1993 .

[79]  Thomas Laurell,et al.  Pore morphology influence on catalytic turn-over for enzyme activated porous silicon matrices , 1998 .

[80]  S. Jackson,et al.  Cycloalkene hydrogenation over palladium catalysts , 1999 .

[81]  R. Austin,et al.  Hydrodynamic Focusing on a Silicon Chip: Mixing Nanoliters in Microseconds , 1998 .

[82]  Tianshou Zhao,et al.  Gas–liquid two-phase flow regimes in rectangular channels with mini/micro gaps , 1999 .

[83]  B. G. Potter,et al.  Optically defined multifunctional patterning of photosensitive thin-film silica mesophases. , 2000, Science.

[84]  W. H. Weinberg,et al.  Combinatorial methods in homogeneous and heterogeneous catalysis , 1998 .

[85]  H. Strathmann,et al.  Microfabrication of membranes with extreme porosity and uniform pore size , 1988 .

[86]  J. Charpentier,et al.  Some liquid holdup experimental data in trickle-bed reactors for foaming and nonfoaming hydrocarbons , 1975 .

[87]  Volker Lehmann,et al.  Porous silicon-a new material for MEMS , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[88]  Y. Tai,et al.  Microfabricated Silicon Mixers for Submillisecond Quench-Flow Analysis , 1998 .

[89]  R. Oleschuk,et al.  Trapping of bead-based reagents within microfluidic systems: on-chip solid-phase extraction and electrochromatography , 2000, Analytical chemistry.

[90]  Charles N. Satterfield,et al.  Heterogeneous catalysis in industrial practice , 1991 .

[91]  K. R. Williams,et al.  Novel interconnection technologies for integrated microfluidic systems , 1998 .

[92]  M. Vannice,et al.  Liquid-Phase Hydrogenation of Citral over Pt/SiO2 Catalysts: I. Temperature Effects on Activity and Selectivity , 2000 .

[93]  J. C. Sheehan,et al.  Notes- A Convenient Synthesis of Water-Soluble Carbodiimides. , 1961 .

[94]  Wolfgang Ehrfeld,et al.  Direct fluorination of toluene using elemental fluorine in gas/liquid microreactors , 2000 .

[95]  S. Dewitt,et al.  Micro reactors for chemical synthesis , 1999 .

[96]  R. Chambers,et al.  Microreactors for elemental fluorine , 1999 .

[97]  J. Voldman,et al.  An integrated liquid mixer/valve , 2000, Journal of Microelectromechanical Systems.

[98]  K. Barla,et al.  The kinetics and mechanism of oxide layer formation from porous silicon formed on p‐Si substrates , 1987 .