Micro mirror and method for fabricating thereof

While driving at a high speed discloses a micro-mirror structure is improved so as to have a large driving angle. Micro-mirror according to the present disclosed invention, reflecting light, and a rotatable circular mirror section, supporting the mirror and the pair of spring sections which the rotation axis when the mirror rotation driving portion, an elliptical connector for connecting the mirror section and the pair of spring portions, and It characterized in that it comprises a driving unit comprising a fixed comb for generating electrostatic force, which is installed so as to correspond to be positioned above and / or below the mobile comb and the movement is installed on the connection comb. Such micromirrors, if the rotational moment of inertia, by the connection of the ellipse is not significantly increased standing moment is enabling of larger structure implementation, therefore, provide a high-speed optical scanner having a large driving angle required by the laser TV high-resolution can do. A laser beam, a micro mirror, a projector, an optical scanner, a comb (COMB), MEMS, moment